On electron heating mechanism in low pressure high density inductively coupled plasma (ICP)

2003 ◽  
Author(s):  
ChinWook Chung ◽  
K.-I. You
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
High Density ◽  
Electron Heating ◽  
Inductively Coupled ◽  
Heating Mechanism

Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 025001 ◽  
Author(s):  
L Lallement ◽  
A Rhallabi ◽  
C Cardinaud ◽  
M C Peignon-Fernandez ◽  
L L Alves
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Global Model ◽  
Inductively Coupled

Diamond Deposition and Behavior of Atomic Carbon Species in a Low-Pressure Inductively Coupled Plasma

1999 ◽  
Vol 38 (Part 1, No. 7B) ◽  
pp. 4504-4507 ◽  
Author(s):  
Haruhiko Ito ◽  
Kungen Teii ◽  
Masayuki Ishikawa ◽  
Masafumi Ito ◽  
Masaru Hori ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Diamond Deposition ◽  
Atomic Carbon ◽  
Inductively Coupled ◽  
Carbon Species ◽  
And Behavior
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