Two-dimensional modeling of nonlocal electron heating in inductively coupled plasma sources

2003 ◽  
Author(s):  
Y. Hu ◽  
T.L. Lin ◽  
C.W. Chang
Keyword(s):  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Electron Heating ◽  
Plasma Sources ◽  
Inductively Coupled ◽  
Dimensional Modeling

Global model for pulsed inductively coupled plasma sources: Effect of edge-to-center density ratio and electron heating

2020 ◽  
Vol 27 (7) ◽  
pp. 073507
Author(s):  
Deuk-Chul Kwon ◽  
Dong-Hun Yu ◽  
Hyoungcheol Kwon ◽  
Yeon Ho Im ◽  
Hyo-Chang Lee
Keyword(s):  
Inductively Coupled Plasma ◽  
Density Ratio ◽  
Global Model ◽  
Electron Heating ◽  
Plasma Sources ◽  
Inductively Coupled ◽  
Center Density

Two-Dimensional Modeling of Spatiotemporal Structure of Inductively Coupled Plasma

1999 ◽  
Vol 38 (Part 1, No. 7B) ◽  
pp. 4429-4435 ◽  
Author(s):  
Kazuhiro Kamimura ◽  
Katumi Iyanagi ◽  
Nobuhiko Nakano ◽  
Toshiaki Makabe
Keyword(s):  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Spatiotemporal Structure ◽  
Inductively Coupled ◽  
Dimensional Modeling

Two‐dimensional hybrid model of inductively coupled plasma sources for etching

1993 ◽  
Vol 63 (5) ◽  
pp. 605-607 ◽  
Author(s):  
Peter L. G. Ventzek ◽  
Timothy J. Sommerer ◽  
Robert J. Hoekstra ◽  
Mark J. Kushner
Keyword(s):  
Hybrid Model ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Plasma Sources ◽  
Inductively Coupled
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