Particle in cell simulation of dual frequency capacitive discharges
2014 ◽
Vol 47
(28)
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pp. 285201
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Keyword(s):
2020 ◽
Vol 140
(6)
◽
pp. 318-324
2011 ◽
Vol 182
(3)
◽
pp. 564-569
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1997 ◽
Vol 36
(Part 2, No. 3B)
◽
pp. L365-L367
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