Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: Experiments and particle-in-cell simulation

2021 ◽  
Author(s):  
Jun-Chieh Wang ◽  
Peng Tian ◽  
Jason Kenney ◽  
Shahid Rauf ◽  
Ihor Korolov ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Low Pressure ◽  
Distribution Functions ◽  
Dual Frequency ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distribution ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Energy Distribution Functions

Behavior of Time-Resolved Ion Energy Distribution Functions during Ion-Ion Instability

1993 ◽  
Vol 32 (Part 1, No. 10) ◽  
pp. 4756-4760
Author(s):  
Yoshifumi Saitou ◽  
Yoshiharu Nakamura ◽  
Masayoshi Tanaka ◽  
Akio Komori ◽  
Yoshinobu Kawai
Keyword(s):  
Energy Distribution ◽  
Distribution Functions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Energy Distribution Functions

Model and particle-in-cell simulation of ion energy distribution in collisionless sheath

2015 ◽  
Vol 22 (6) ◽  
pp. 063506 ◽  
Author(s):  
Zhuwen Zhou ◽  
Bo Kong ◽  
Deliang Chen ◽  
Yuee Luo ◽  
Yuansheng Wang
Keyword(s):  
Energy Distribution ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Particle In Cell ◽  
Cell Simulation
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