Design and Fabrication of Micromachined Silicon Based Mid Infrared Multilenses for Gas Sensing Applications

2007 ◽  
Author(s):  
J. Fonollosa ◽  
R. Rubio ◽  
J. Hildenbrand ◽  
S. Hartwig ◽  
J. Santander ◽  
...  
Keyword(s):  
Gas Sensing ◽  
Mid Infrared ◽  
Sensing Applications ◽  
Silicon Based

Design and fabrication of silicon-based mid infrared multi-lenses for gas sensing applications

2008 ◽  
Vol 132 (2) ◽  
pp. 498-507 ◽  
Author(s):  
J FONOLLOSA ◽  
R RUBIO ◽  
S HARTWIG ◽  
S MARCO ◽  
J SANTANDER ◽  
...  
Keyword(s):  
Gas Sensing ◽  
Mid Infrared ◽  
Sensing Applications ◽  
Silicon Based

Silicon photonic devices for mid-infrared applications

Nanophotonics ◽  
2014 ◽  
Vol 3 (4-5) ◽  
pp. 329-341 ◽  
Author(s):  
Raji Shankar ◽  
Marko Lončar
Keyword(s):  
Gas Sensing ◽  
Wavelength Region ◽  
Photonic Devices ◽  
Ring Resonators ◽  
Space Communications ◽  
Mid Infrared ◽  
Silicon Photonic ◽  
Processing Techniques ◽  
Silicon Based

AbstractThe mid-infrared (IR) wavelength region (2–20 µm) is of great interest for a number of applications, including trace gas sensing, thermal imaging, and free-space communications. Recently, there has been significant progress in developing a mid-IR photonics platform in Si, which is highly transparent in the mid-IR, due to the ease of fabrication and CMOS compatibility provided by the Si platform. Here, we discuss our group’s recent contributions to the field of silicon-based mid-IR photonics, including photonic crystal cavities in a Si membrane platform and grating-coupled high-quality factor ring resonators in a silicon-on-sapphire (SOS) platform. Since experimental characterization of microphotonic devices is especially challenging at the mid-IR, we also review our mid-IR characterization techniques in some detail. Additionally, pre- and post-processing techniques for improving device performance, such as resist reflow, Piranha clean/HF dip cycling, and annealing are discussed.

scholarly journals Mid-infrared GaSb-based resonant tunneling diode photodetectors for gas sensing applications

2018 ◽  
Vol 112 (16) ◽  
pp. 161107 ◽  
Author(s):  
F. Rothmayr ◽  
A. Pfenning ◽  
C. Kistner ◽  
J. Koeth ◽  
G. Knebl ◽  
...  
Keyword(s):  
Resonant Tunneling ◽  
Gas Sensing ◽  
Resonant Tunneling Diode ◽  
Mid Infrared ◽  
Sensing Applications ◽  
Tunneling Diode

scholarly journals Antiresonant Hollow-Core Fiber-Based Dual Gas Sensor for Detection of Methane and Carbon Dioxide in the Near- and Mid-Infrared Regions

Sensors ◽  
2020 ◽  
Vol 20 (14) ◽  
pp. 3813 ◽  
Author(s):  
Piotr Jaworski ◽  
Paweł Kozioł ◽  
Karol Krzempek ◽  
Dakun Wu ◽  
Fei Yu ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Gas Sensor ◽  
Gas Sensing ◽  
Simultaneous Detection ◽  
Hollow Core ◽  
Mid Infrared ◽  
Sensing Applications ◽  
Core Fiber ◽  
Sensor Configuration ◽  
Carbon Dioxide Co2

In this work, we present for the first time a laser-based dual gas sensor utilizing a silica-based Antiresonant Hollow-Core Fiber (ARHCF) operating in the Near- and Mid-Infrared spectral region. A 1-m-long fiber with an 84-µm diameter air-core was implemented as a low-volume absorption cell in a sensor configuration utilizing the simple and well-known Wavelength Modulation Spectroscopy (WMS) method. The fiber was filled with a mixture of methane (CH4) and carbon dioxide (CO2), and a simultaneous detection of both gases was demonstrated targeting their transitions at 3.334 µm and 1.574 µm, respectively. Due to excellent guidance properties of the fiber and low background noise, the proposed sensor reached a detection limit down to 24 parts-per-billion by volume for CH4 and 144 parts-per-million by volume for CO2. The obtained results confirm the suitability of ARHCF for efficient use in gas sensing applications for over a broad spectral range. Thanks to the demonstrated low loss, such fibers with lengths of over one meter can be used for increasing the laser-gas molecules interaction path, substituting bulk optics-based multipass cells, while delivering required flexibility, compactness, reliability and enhancement in the sensor’s sensitivity.

scholarly journals Optical immersion of mid-infrared LEDs and photodiodes for gas-sensing applications

2003 ◽  
Author(s):  
Harvey R. Hardaway ◽  
C. T. Elliot ◽  
Neil T. Gordon ◽  
J. G. Crowder
Keyword(s):  
Gas Sensing ◽  
Mid Infrared ◽  
Sensing Applications ◽  
Optical Immersion

GaSb-based D-DFB laser diodes for gas sensing applications in the mid-infrared region

2021 ◽  
Author(s):  
Morten Hoppe ◽  
Christian Assmann ◽  
Sebastian Schmidtmann ◽  
Tobias Milde ◽  
Martin Honsberg ◽  
...  
Keyword(s):  
Gas Sensing ◽  
Laser Diodes ◽  
Infrared Region ◽  
Mid Infrared ◽  
Sensing Applications ◽  
Dfb Laser

Mid-infrared semiconductor heterostructure lasers for gas sensing applications

2010 ◽  
Vol 26 (1) ◽  
pp. 014032 ◽  
Author(s):  
A Bauer ◽  
K Rößner ◽  
T Lehnhardt ◽  
M Kamp ◽  
S Höfling ◽  
...  
Keyword(s):  
Gas Sensing ◽  
Mid Infrared ◽  
Sensing Applications ◽  
Semiconductor Heterostructure

Silicon based integrated hollow waveguide for gas sensing applications

2020 ◽  
Author(s):  
Alaa Fathy ◽  
Yasser Sabry ◽  
Frédéric Marty ◽  
Diaa Khalil ◽  
Tarik Bourouina
Keyword(s):  
Gas Sensing ◽  
Hollow Waveguide ◽  
Sensing Applications ◽  
Silicon Based
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