Finite element analysis of a dual-layer substrate sandwiched bridge piezoelectric transducer for harvesting energy from asphalt pavement

2019 ◽  
Author(s):  
Su Xian Long ◽  
Shin Yee Khoo ◽  
Zhi Chao Ong ◽  
Ming Foong Soong
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Piezoelectric Transducer ◽  
Asphalt Pavement ◽  
Element Analysis

Simulations and Experiment Analysis of a Piezoelectric Micropump

2012 ◽  
Vol 229-231 ◽  
pp. 1688-1692 ◽  
Author(s):  
Yan Fang Guan ◽  
Ming Gang Shen ◽  
Li Li Han
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Flow Rate ◽  
Piezoelectric Transducer ◽  
Working Condition ◽  
Coupling Analysis ◽  
Element Analysis ◽  
Deep Reactive Ion Etching ◽  
First Order ◽  
Experiment Analysis

The application of micropump in microanalytical reagent is widely. In this paper a piezoelectric micropump model that looks like a sandwitch has been put forward. The main structures of the micropump include inlet and outlet pipe, silicon substrate pump body, piezoelectric transducer. In order to find the excellent driving performance, the modals and piezoelectric-stress coupling analysis of the piezoelectric transducer has been carried out with finite element analysis methods. The result proves that the optimal working condition of the micropump is the 1st mode. Finally the micropump model has been fabricated with silicon deep reactive ion etching and UV irreversible irradiation. Through experiment the flow rate and pressure of the micropump reach the maximum in first-order modal that is less than 1000 Hz, and this is accord with the modal analysis.

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