Non-contact transportation system for thin glass plate utilizing combination of air bearing and electrostatic force
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2008 ◽
Vol 75
(5)
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pp. 1015-1026
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2021 ◽
Vol 2
(3)
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pp. 74-89
1999 ◽
Vol 105
(6)
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pp. 3290-3294
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1998 ◽
Vol 37
(Part 1, No. 5B)
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pp. 2936-2939
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2007 ◽
Vol 73
(730)
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pp. 716-723
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2007 ◽
Vol 48
(3)
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pp. 367-374
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2002 ◽
Vol 2002
(0)
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pp. 419-420