CMP profile simulation using an elastic model based on nonlinear contact analysis

Author(s):  
Yoo-Hyon Kim ◽  
Tai-Kyung Kim ◽  
Hoong-Joo Lee ◽  
Jeong-Taek Kong ◽  
Sang-Hoon Lee
1999 ◽  
Vol 18 (10) ◽  
pp. 828-839 ◽  
Author(s):  
A. Kelemen ◽  
G. Szekely ◽  
G. Gerig
Keyword(s):  

Author(s):  
S. Miyazaki ◽  
M. Endo ◽  
M. Yamada ◽  
J. Hasegawa ◽  
T. Yasuda ◽  
...  

2020 ◽  
Vol 142 (11) ◽  
Author(s):  
Christian Berthold ◽  
Johann Gross ◽  
Christian Frey ◽  
Malte Krack

Abstract Flutter stability is a dominant design constraint of modern turbines. Thus, flutter-tolerant designs are currently explored, where the resulting vibrations remain within acceptable bounds. In particular, friction damping has the potential to yield limit cycle oscillations (LCOs) in the presence of a flutter instability. To predict such LCOs, it is the current practice to model the aerodynamic forces in terms of aerodynamic influence coefficients for a linearized structural model with fixed oscillation frequency. This approach neglects that both the nonlinear contact interactions and the aerodynamic stiffness cause a change in the deflection shape and the frequency of the LCO. This, in turn, may have a substantial effect on the aerodynamic damping. The goal of this paper is to assess the importance of these neglected interactions. To this end, a state-of-the-art aero-elastic model of a low pressure turbine blade row is considered, undergoing nonlinear frictional contact interactions in the tip shroud interfaces. The LCOs are computed with a fully coupled harmonic balance method, which iteratively computes the Fourier coefficients of structural deformation and conservative flow variables, as well as the a priori unknown frequency. The coupled algorithm was found to provide excellent computational robustness and efficiency. Moreover, a refinement of the conventional energy method is developed and assessed, which accounts for both the nonlinear contact boundary conditions and the linearized aerodynamic influence. It is found that the conventional energy method may not predict a limit cycle oscillation at all while the novel approach presented here can.


2013 ◽  
Vol 50 (11) ◽  
pp. 1129-1142 ◽  
Author(s):  
Shui-Long Shen ◽  
Lei Ma ◽  
Ye-Shuang Xu ◽  
Zhen-Yu Yin

Shanghai is a typical example of a region in China suffering from severe land subsidence. Previous investigations have shown that land subsidence is strongly related to groundwater pumping in both the temporal and spatial domains. A series of field investigations shows that the deformation rate of aquifer IV (AqIV) has increased, contributing significantly to the total subsidence in Shanghai. To predict the deformation behavior of AqIV in Shanghai due to groundwater pumping, four different models have been applied in this study: (i) a model based on groundwater flow theory, (ii) an elastic model based on Cauchy mechanics, (iii) a creep model incorporated into Cauchy mechanics, and (iv) a recently proposed land subsidence model by Budhu based on Cosserat mechanics. Based on a number of assumptions, Budhu’s concept was extended to consider the time-dependent behavior of groundwater potential in aquifers and the consolidation behavior of overburdened aquitards. The calculated results of AqIV’s deformation were compared with the field-measured data. The results show that when using groundwater flow theory and Cauchy mechanics, it is difficult to predict the increased deformation rate of the sandy layers in aquifers even when the creep behavior is incorporated into the calculation. However, Budhu’s method based on Cosserat mechanics can predict this increased deformation rate well. The predicted result indicates that increased deformation of aquifer IV is due to volumetric contraction caused by shear stress rather than the creep of aquifer sand. The phenomenon of deformation delay in aquifers can also be interpreted with the proposed model.


2011 ◽  
Vol 86 ◽  
pp. 771-774 ◽  
Author(s):  
Xiao Xia Chen ◽  
Shu Zhong Lin ◽  
Jing Zhong Xing ◽  
Yu Sheng Liu

The displacement of tooth and the deformation of flexspline of harmonic drive in transmission state were studied by finite element model with shell element. A finite element model of flexspline based on shell element was built with taper teeth on the flexspline, and the contact relationship was defined by contact element between the flexspline and wave generator. The deformation distribution of the flexspline and the deformed position of the teeth on the flexspline were obtained by nonlinear contact analysis in ANSYS environment under the transmission forces according to the loading distribution in the reference. The position of teeth tip and teeth root in front, middle and back plane along teeth length were given by the deformation results. The research shows that the positions and orientations of the teeth in the planes have quite different distributions, which may influence mesh property evidently. The deformation in transmission state in the paper is of importance in heavy loading harmonic drive design because there is no theory results for flexspline in transmission state.


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