Modeling of photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets

2007 ◽  
Vol 14 (3) ◽  
pp. 393-398 ◽  
Author(s):  
Bing-hai Zhou ◽  
Qing-zhi Pan ◽  
Shi-jin Wang ◽  
Bin Wu
Keyword(s):  
Petri Nets ◽  
Wafer Fabrication ◽  
Semiconductor Wafer ◽  
Hybrid Petri Nets ◽  
Semiconductor Wafer Fabrication ◽  
Photolithography Process

Kohonen Neural Network – Based Performance Improvements for Wafer Photolithography Process with CONWIP Control Strategy

2010 ◽  
Vol 44-47 ◽  
pp. 18-22
Author(s):  
Bing Hai Zhou
Keyword(s):  
Neural Network ◽  
Dynamic Scheduling ◽  
Learning Algorithm ◽  
Wafer Fabrication ◽  
Semiconductor Wafer ◽  
Combination Rules ◽  
Performance Improvements ◽  
Kohonen Neural Network ◽  
Semiconductor Wafer Fabrication ◽  
Photolithography Process

Photolithography is usually the bottleneck process with the most expensive equipment in a semiconductor wafer fabrication system. To improve the performances of the photolithography area with dynamic combination rules, a method of Kohonen neural network (KNN)–based performance improvements is proposed. First, a dynamic scheduling framework based on a KNN model and scheduling rules is proposed. A KNN-based sample learning algorithm for improving the performances is presented. Finally, to demonstrate the validity and feasibility of the proposed method, data from a real wafer fabrication system are used to simulate the proposed method. Results of simulation experiments indicate that the proposed method can be used to improve a complex wafer photolithography performance.

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