High-performance differential capacitive mems sensor readout with relaxation oscillator front-end and phase locked loop time-to-digital converter back-end

Author(s):  
Kevin T. C. Chai ◽  
Chao Wang ◽  
Jifang Tao ◽  
Jinghui Xu ◽  
Liang Zhong ◽  
...  
2017 ◽  
Vol 63 (3) ◽  
pp. 336-345
Author(s):  
Jin Wu ◽  
Chao Wang ◽  
Shu-fang Shi ◽  
Xiang-rong Yu ◽  
Li-xia Zheng ◽  
...  

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