High-performance differential capacitive mems sensor readout with relaxation oscillator front-end and phase locked loop time-to-digital converter back-end
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2012 ◽
Vol 83
(7)
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pp. 074703
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2017 ◽
Vol 25
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pp. 2410-2423
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2018 ◽
Vol 102
(4)
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pp. 3343-3359
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