Abstract
Silicon pressure sensors have been widely used in the automotive and health care industries since the last decade, especially in automotive applications. Initially, the sensors mounted in cars are used to reduce the emission pollution and improve the gas consumption. Today, sensors are commonly used in many automotive systems. High volume, low price, and small size are the major keys to the success of the automotive pressure sensor business. More mature micromachining operations, better understanding of material properties, improved mechanical packaging, better circuit and system design, higher volume production test, and application engineering to fit the end user system requirements are all important factors that contribute to the commercial success of pressure sensors.
Novel concept of a low-power high-volume microfluidic actuator: theory of operation and experimental characterization
