Impact of encapsulation materials on the performance of silicon-based solid state high pressure sensors with surface trenches

Author(s):  
M. Baumann ◽  
C. Sander ◽  
P. Ruther ◽  
O. Paul
Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4419
Author(s):  
Ting Li ◽  
Haiping Shang ◽  
Weibing Wang

A pressure sensor in the range of 0–120 MPa with a square diaphragm was designed and fabricated, which was isolated by the oil-filled package. The nonlinearity of the device without circuit compensation is better than 0.4%, and the accuracy is 0.43%. This sensor model was simulated by ANSYS software. Based on this model, we simulated the output voltage and nonlinearity when piezoresistors locations change. The simulation results showed that as the stress of the longitudinal resistor (RL) was increased compared to the transverse resistor (RT), the nonlinear error of the pressure sensor would first decrease to about 0 and then increase. The theoretical calculation and mathematical fitting were given to this phenomenon. Based on this discovery, a method for optimizing the nonlinearity of high-pressure sensors while ensuring the maximum sensitivity was proposed. In the simulation, the output of the optimized model had a significant improvement over the original model, and the nonlinear error significantly decreased from 0.106% to 0.0000713%.


2019 ◽  
Vol 7 (16) ◽  
pp. 9432-9446 ◽  
Author(s):  
Zhixin Xu ◽  
Jun Yang ◽  
Hongping Li ◽  
Yanna Nuli ◽  
Jiulin Wang

Recent progress in electrolytes from the liquid to the solid state for Si-based anodes is comprehensively summarized in this review article.


AIP Advances ◽  
2019 ◽  
Vol 9 (3) ◽  
pp. 035304
Author(s):  
You Shan ◽  
Guojun Zhou ◽  
Kairen Chen ◽  
Changchun Zhao ◽  
Kun Shen ◽  
...  

2021 ◽  
Vol 31 (3) ◽  
pp. 415-418
Author(s):  
Vladimir Yu. Osipov ◽  
Fedor M. Shakhov ◽  
Nikolai M. Romanov ◽  
Kazuyuki Takai

2021 ◽  
pp. 160419
Author(s):  
Yan Beygelzimer ◽  
Yuri Estrin ◽  
Andrey Mazilkin ◽  
Torsten Scherer ◽  
Brigitte Baretzky ◽  
...  

1970 ◽  
Vol 19 (199) ◽  
pp. 302-305 ◽  
Author(s):  
Kiyohisa IMADA ◽  
Tsuneo YAMAMOTO ◽  
Koichi UENO ◽  
Daisaku MATSUKUMA ◽  
Motowo TAKAYANAGI
Keyword(s):  

2016 ◽  
Vol 2 (1) ◽  
Author(s):  
Joe O’Gorman ◽  
Naomi H Nickerson ◽  
Philipp Ross ◽  
John JL Morton ◽  
Simon C Benjamin

Abstract Individual impurity atoms in silicon can make superb individual qubits, but it remains an immense challenge to build a multi-qubit processor: there is a basic conflict between nanometre separation desired for qubit–qubit interactions and the much larger scales that would enable control and addressing in a manufacturable and fault-tolerant architecture. Here we resolve this conflict by establishing the feasibility of surface code quantum computing using solid-state spins, or ‘data qubits’, that are widely separated from one another. We use a second set of ‘probe’ spins that are mechanically separate from the data qubits and move in and out of their proximity. The spin dipole–dipole interactions give rise to phase shifts; measuring a probe’s total phase reveals the collective parity of the data qubits along the probe’s path. Using a protocol that balances the systematic errors due to imperfect device fabrication, our detailed simulations show that substantial misalignments can be handled within fault-tolerant operations. We conclude that this simple ‘orbital probe’ architecture overcomes many of the difficulties facing solid-state quantum computing, while minimising the complexity and offering qubit densities that are several orders of magnitude greater than other systems.


Sign in / Sign up

Export Citation Format

Share Document