Impact on film bulk acoustic resonator tempco and quality factor from boron doped SiO2 temperature compensation material
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2011 ◽
Vol 20
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pp. 213-220
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2007 ◽
Vol 400
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pp. 38-41
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2005 ◽
Vol 117
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pp. 62-70
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2005 ◽
Vol 69
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pp. 323-332
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