Design and Fabrication of LAMB Wave Resonator Based on 15% Scandium-Doped Aluminum Nitride Thin Film

2021 ◽  
Author(s):  
Shuai Shao ◽  
Zhifang Luo ◽  
Tao Wu
Keyword(s):  
Thin Film ◽  
Aluminum Nitride ◽  
Lamb Wave ◽  
Wave Resonator

A method for fluid velocity vector measurement using thin film Lamb wave resonator

2017 ◽  
Vol 25 (1) ◽  
pp. 155-162 ◽  
Author(s):  
孔 慧 KONG Hui ◽  
李传宇 LI Chuan-yu ◽  
周连群 ZHOU Lian-qun ◽  
姚 佳 YAO Jia ◽  
唐玉国 TANG Yu-guo ◽  
...  
Keyword(s):  
Thin Film ◽  
Lamb Wave ◽  
Velocity Vector ◽  
Fluid Velocity ◽  
Vector Measurement ◽  
Wave Resonator

Piezoelectric Properties of Aluminum Nitride for Thin Film Bulk Acoustic Wave Resonator

2005 ◽  
Vol 47 (92) ◽  
pp. 309 ◽  
Author(s):  
Nam Kuangwoo ◽  
Park Yunkwon ◽  
Ha Byeoungju ◽  
Shim Dongha ◽  
Song Insang ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Piezoelectric Properties ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

Lateral-field-excited thin-film Lamb wave resonator

2005 ◽  
Vol 86 (15) ◽  
pp. 154103 ◽  
Author(s):  
Johan Bjurström ◽  
Ilia Katardjiev ◽  
Ventsislav Yantchev
Keyword(s):  
Thin Film ◽  
Lamb Wave ◽  
Lateral Field ◽  
Wave Resonator

Thin-film zero-group-velocity Lamb wave resonator

2011 ◽  
Vol 99 (3) ◽  
pp. 033505 ◽  
Author(s):  
Ventsislav Yantchev ◽  
Lilia Arapan ◽  
Ilia Katardjiev ◽  
Victor Plessky
Keyword(s):  
Thin Film ◽  
Group Velocity ◽  
Lamb Wave ◽  
Wave Resonator ◽  
Zero Group

Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

2008 ◽  
Author(s):  
A. Kabulski ◽  
V. R. Pagán ◽  
D. Cortes ◽  
R. Burda ◽  
O. M. Mukdadi ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Sensors ◽  
Wave Sensors
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