Vibration mode analysis of RF film bulk acoustic wave resonator using finite element method
2003 ◽
Vol 43
(5)
◽
pp. 648-650
◽
2009 ◽
Vol 45
(3)
◽
pp. 1116-1119
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 57
(11)
◽
pp. 2537-2549
◽
Keyword(s):
Keyword(s):
Keyword(s):
2018 ◽
Vol 57
(7S1)
◽
pp. 07LC08
◽
2020 ◽
Vol 67
(10)
◽
pp. 2130-2134
Keyword(s):