Development of a high-speed, phase-sensitive laser probe system for RF surface/bulk acoustic wave devices with an autofocus function for long time continuous operation

This paper describes the implementation of the autofocus function for the laser beam into the high-speed, phase-sensitive laser probe system for RF SAW/BAW devices. This implementation can compensate defocus caused during continuous measurements that take dozens of hours. After a brief explanation of the system used in this work, detailed discussion is given on an employed evaluation function indicating focus status, which is a key factor determining autofocus reliability. It is shown that the sum of energy of Laplacians is suitable as the evaluation function, which can be calculated by the image of the probing laser spot captured by a build-in CCD camera. Then, the implementation of the autofocus function into the current system is detailed. It is confirmed that this function can adjust the focus within almost ±20 μm defocus conditions. Finally, it is confirmed how the implemented autofocus function works effectively to keep just-in-focus under the disturbance.

Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications

Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direction and bending direction. Currently, there are few studies on this topic, and the bending mechanisms during off-axis bending deformations have remained unexplored for multisensing applications. Herein, we fabricated aluminum nitride (AlN) flexible SAW devices by using high-quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors. A theoretical model was first developed using coupling wave equations and the boundary condition method to analyze the characteristics of the device with bending and off-axis deformation under elastic strains. The relationships between the frequency shifts of the SAW device and the bending strain and off-axis angle were obtained, and the results were identical to those from the theoretical calculations. Finally, we performed proof-of-concept demonstrations of its multisensing potential by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface, thus paving the way for the application of versatile flexible electronics.

State of the Art in Crystallization of LiNbO3 and Their Applications

Lithium niobate (LiNbO3) crystals are important dielectric and ferroelectric materials, which are widely used in acoustics, optic, and optoelectrical devices. The physical and chemical properties of LiNbO3 are dependent on microstructures, defects, compositions, and dimensions. In this review, we first discussed the crystal and defect structures of LiNbO3, then the crystallization of LiNbO3 single crystal, and the measuring methods of Li content were introduced to reveal reason of growing congruent LiNbO3 and variable Li/Nb ratios. Afterwards, this review provides a summary about traditional and non-traditional applications of LiNbO3 crystals. The development of rare earth doped LiNbO3 used in illumination, and fluorescence temperature sensing was reviewed. In addition to radio-frequency applications, surface acoustic wave devices applied in high temperature sensor and solid-state physics were discussed. Thanks to its properties of spontaneous ferroelectric polarization, and high chemical stability, LiNbO3 crystals showed enhanced performances in photoelectric detection, electrocatalysis, and battery. Furthermore, domain engineering, memristors, sensors, and harvesters with the use of LiNbO3 crystals were formulated. The review is concluded with an outlook of challenges and potential payoff for finding novel LiNbO3 applications.