Fabrication and characterization of a new capacitive micromachined ultrasonic transducer (cMUT) using polysilicon as membrane and sacrificial layer material
2018 ◽
Vol 17
(01)
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pp. 1
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2006 ◽
Vol 321-323
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pp. 132-135
2005 ◽
Vol 297-300
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Vol 24
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pp. 1142-1149
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Vol 2
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pp. 561-568
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