Manufacturing intelligence and smart production for industry 3.5 and empirical study of decision-based virtual metrology for controlling overlay errors

Author(s):  
Chen-Fu Chien ◽  
Ying-Jen Chen
1996 ◽  
Vol 81 (1) ◽  
pp. 76-87 ◽  
Author(s):  
Connie R. Wanberg ◽  
John D. Watt ◽  
Deborah J. Rumsey

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