1T2R Structure with Cross-Spacer for High-Density Phase Change Memory
2011 ◽
Vol 50
(9S1)
◽
pp. 09MD04
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Keyword(s):
2012 ◽
Vol 12
(10)
◽
pp. 7939-7943
Keyword(s):
Dry Etching of Nanosized Ge1Sb2Te4 Patterns Using TiN Hard Mask for High Density Phase-Change Memory
2009 ◽
Vol 9
(2)
◽
pp. 1526-1529
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 87
(11)
◽
pp. 2081-2084
◽
Keyword(s):
2006 ◽
Vol 45
(4B)
◽
pp. 3233-3237
◽
Keyword(s):