Design of Side Bottom-Electrode-Contact for High Density Phase-Change Memory Array
2012 ◽
Vol 12
(10)
◽
pp. 7939-7943
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2007 ◽
Vol 90
(1)
◽
pp. 88-94
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2011 ◽
Vol 50
(9S1)
◽
pp. 09MD04
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Keyword(s):
Dry Etching of Nanosized Ge1Sb2Te4 Patterns Using TiN Hard Mask for High Density Phase-Change Memory
2009 ◽
Vol 9
(2)
◽
pp. 1526-1529
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Keyword(s):
The effect of oxygen plasma ashing on the resistance of TiN bottom electrode for phase change memory
2015 ◽
Vol 36
(5)
◽
pp. 056001
◽
Keyword(s):
Keyword(s):