Study of Carrier Mobility of Low-Energy, High-Dose Ion Implantations Using Continuous Anodic Oxidation Technique/Differential Hall Effect (CAOT/DHE) Measurements

2010 ◽  
Author(s):  
Shu Qin ◽  
Y. Jeff Hu ◽  
Allen McTeer ◽  
Si Prussin ◽  
Jason Reyes
Keyword(s):  
Hall Effect ◽  
Anodic Oxidation ◽  
Carrier Mobility ◽  
Low Energy ◽  
High Dose ◽  
Anodic Oxidation Technique

Study of Carrier Mobility of Low-Energy High-Dose Ion Implantations

2011 ◽  
Vol 39 (1) ◽  
pp. 587-592 ◽  
Author(s):  
Shu Qin ◽  
Simon A. Prussin ◽  
Jason Reyes ◽  
Yongjun Jeff Hu ◽  
Allen McTeer
Keyword(s):  
Carrier Mobility ◽  
Low Energy ◽  
High Dose
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