Simulation in automated material handling systems design for semiconductor manufacturing
Kuo-Hao Chang
◽
Robert Cuckler
Mutaz Haddadin
◽
William Moreno
2021 ◽
Vol 58
◽
pp. 316-334
Lihui Wu
◽
Zhongwei Zhang
◽
Jie Zhang
◽
Ray Y. Zhong
◽
Junliang Wang
2004 ◽
Vol 42
(17)
◽
pp. 3551-3564
◽
R. F. Babiceanu
◽
F. F. Chen *
◽
R. H. Sturges
U. Bader
◽
A. Besler
◽
J. Schliesser
◽
J. Dorner
2003 ◽
Vol 19
(1-2)
◽
pp. 141-145
◽
Alin Beschorner
◽
Detlev Glüer
Chia-Wen Yang
◽
Kuo-Sung Huang
◽
Gary Yu
◽
Dong-Yeh Jan