Capacity Analysis of Automated Material Handling Systems in Semiconductor Fabs
M.E. Kuhl
◽
J. Christopher
2021 ◽
Vol 58
◽
pp. 316-334
Lihui Wu
◽
Zhongwei Zhang
◽
Jie Zhang
◽
Ray Y. Zhong
◽
Junliang Wang
2004 ◽
Vol 42
(17)
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pp. 3551-3564
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R. F. Babiceanu
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F. F. Chen *
◽
R. H. Sturges
U. Bader
◽
A. Besler
◽
J. Schliesser
◽
J. Dorner
2003 ◽
Vol 19
(1-2)
◽
pp. 141-145
◽
Alin Beschorner
◽
Detlev Glüer
Chia-Wen Yang
◽
Kuo-Sung Huang
◽
Gary Yu
◽
Dong-Yeh Jan
2015 ◽
Vol 29
(1)
◽
pp. 155-164
◽
Sameh Haneyah
◽
Johann Hurink
◽
Marco Schutten
◽
Henk Zijm
◽
Peter Schuur