Yttrium iron garnet (Y3Fe5O12) films were prepared by a sol-gel method followed by an annealing process at 500,600,700,800, and 900°C in oxygen atmosphere for 2 hours. The microstructure characterization carried out by an X-ray diffractometer showed that the film started to crystalline into YIG phase at 700°C. The average grain size of the films measured using a field emission scanning electron microscope gave the average value of 20 to 70 nm. The magnetic properties measured by a vibrating sample magnetometer showed that all of the films were soft magnetic materials. The saturation magnetization values increased with the increment of annealing temperature. However, the coercivity values were independence with temperatures.Keywords:Thinfilms;Crystalline;Sol-gelmethod;