Processing map to control the erosion of Y
2
O
3
in fluorine based etching plasmas
Keyword(s):
2020 ◽
Vol 35
(6)
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pp. 1104-1115
Keyword(s):
2021 ◽
Vol 693
(1)
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pp. 012070
Keyword(s):
2020 ◽
Vol 51
(12)
◽
pp. 6679-6699
2013 ◽
Vol 29
(1)
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pp. 24-29
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