Design of Miniature Electromagnetic Induction Type MEMS Generators With Multilayer Ceramic Circuit

2015 ◽  
Author(s):  
Minami Takato ◽  
Hiroaki Endo ◽  
Yuji Yokozeki ◽  
Kazuaki Maezumi ◽  
Ken Saito ◽  
...  
Keyword(s):  
Rotational Motion ◽  
Electromagnetic Induction ◽  
Magnetic Circuit ◽  
Three Dimensional ◽  
Magnetic Core ◽  
Ceramic Technology ◽  
Micro Electro Mechanical Systems ◽  
Air Turbine ◽  
Induction Type ◽  
Multilayer Ceramic

This paper discusses the design of a miniature electromagnetic induction type air turbine generator with a multilayer ceramic magnetic circuit. The air turbine is fabricated using a micro electro mechanical systems (MEMS) process, which can form high-accuracy, high-aspect-ratio parts. The magnetic circuit is fabricated using a multilayer ceramic technology that can form a three-dimensional conductor pattern into which a magnetic material can be introduced. By combining these technologies, a miniature generator comprising a miniature magnetic circuit with a helical conductor structure and magnetic core is achieved. In this study, a three-phase and a single-phase generator were fabricated, which produced rotational motion and output waveforms. In this paper, the generators are discussed with respect to the rotational motion and the shape of the magnetic circuit.

Development of Miniature Electromagnetic Devices Combined with Silicon and Magnetic Ceramic

2014 ◽  
Vol 704 ◽  
pp. 305-312 ◽  
Author(s):  
Minami Takato ◽  
Hiroaki Endo ◽  
Kazuaki Maezumi ◽  
Yuji Yokozeki ◽  
Ken Saito ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Helical Structure ◽  
Ceramic Technology ◽  
Portable Devices ◽  
Turbine Generator ◽  
Micro Electro Mechanical Systems ◽  
Magnetic Devices ◽  
Electromagnetic Devices ◽  
Air Turbine ◽  
Mems Technology

As portable devices become smaller and more convenient, they increasingly require miniaturized batteries that preserve the light weight of the device while delivering sufficient power. However, miniaturization of conventional magnetic devices is precluded by the magnetic material and helical structure of the coil. To solve this problem, we introduce a multilayer ceramic technology that realizes three-dimensional miniature magnetic devices. The miniature components are fabricated by micro-electro-mechanical systems (MEMS) technology. This paper describes an electromagnetic motor and an electromagnetic induction type air turbine generator developed through MEMS and multilayer ceramic technologies. The fabricated motor is 4.2 [mm] in diameter and 6.0 [mm] in height, runs at 1080 rpm, and has a consumption power of 0.11 [W]. The air turbine generator is 10.6 [mm] long, 10.6 [mm] wide, and 3.6 [mm] high. Connected to a 4 [Ω] load resistor, its output power is 195 [μVA] at a rotational speed of 9000 rpm.

Evaluation of DC Brush-Less Motors Using Powder Magnetic Cores

2007 ◽  
Vol 534-536 ◽  
pp. 1317-1320
Author(s):  
Katsuhiko Mori ◽  
Ryoji Nakayama ◽  
Kinji Kanagawa
Keyword(s):  
High Speed ◽  
Magnetic Circuit ◽  
Three Dimensional ◽  
Magnetic Core ◽  
Factory Automation ◽  
Steel Core ◽  
Magnetic Cores

A high-speed motor and a DC brush-less motor for factory automation (FA) were made to investigate the applicability of the powder magnetic core to motor application. The performances of these motors were compared with the similar motors having conventional electromagnetic steel core. Although the permeability and saturated magnetization of powder magnetic core were less than those of electromagnetic steel core, the output performances of each core motor were almost the same. The FA motor with powder magnetic core using three-dimensional magnetic circuit showed higher torque than the electromagnetic steel core motor with the same volume.

scholarly journals Functionalized Three-Dimensional Multilayer Ceramic Modules

Electronics ◽  
2021 ◽  
Vol 10 (3) ◽  
pp. 248
Author(s):  
Manja Kloska ◽  
Heike Bartsch ◽  
Jens Müller ◽  
Thomas Haas ◽  
Christian Zeilmann
Keyword(s):  
Three Dimensional ◽  
Ceramic Technology ◽  
Harsh Environments ◽  
Minimum Width ◽  
Plastic Materials ◽  
Technological Chain ◽  
Single Process ◽  
Multilayer Ceramic ◽  
Third Dimension ◽  
Multilayer Substrate

Three-dimensional interconnect devices are still strongly related to plastic materials. Since the use of these materials is limited in harsh environments, there is an application gap, which could be filled by ceramic circuit carriers. Low-temperature cofired ceramics (LTCC) offer promising solutions to fill this gap. This work provides a feasibility study, including the whole technological chain of ceramic multilayer processing. Targeting a curved multilayer substrate, fully equipped with SMD (Surface-mounted device) components, the particularities of single process steps are investigated. Two shaping methods based on quartz glass molds are compared with regard to shape fidelity and technological effort. The investigation of internal conductor lines and via connections reveals that the metallization should have a minimum width of 200 µm and the via diameter is limited to 150 µm. Further considerations focus on the possible footprint of components and use of cavities to increase the footprint of components. The limits of wire bonding on curved surfaces were inspected. Finally, the work presents a demonstrator of a fully equipped four-layer ceramic circuit, including internal wiring. Hence, the transfer of the 2.5-dimensional multilayer ceramic technology into the third dimension is proven.

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