Development of Miniature Electromagnetic Devices Combined with Silicon and Magnetic Ceramic

2014 ◽  
Vol 704 ◽  
pp. 305-312 ◽  
Author(s):  
Minami Takato ◽  
Hiroaki Endo ◽  
Kazuaki Maezumi ◽  
Yuji Yokozeki ◽  
Ken Saito ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Helical Structure ◽  
Ceramic Technology ◽  
Portable Devices ◽  
Turbine Generator ◽  
Micro Electro Mechanical Systems ◽  
Magnetic Devices ◽  
Electromagnetic Devices ◽  
Air Turbine ◽  
Mems Technology

As portable devices become smaller and more convenient, they increasingly require miniaturized batteries that preserve the light weight of the device while delivering sufficient power. However, miniaturization of conventional magnetic devices is precluded by the magnetic material and helical structure of the coil. To solve this problem, we introduce a multilayer ceramic technology that realizes three-dimensional miniature magnetic devices. The miniature components are fabricated by micro-electro-mechanical systems (MEMS) technology. This paper describes an electromagnetic motor and an electromagnetic induction type air turbine generator developed through MEMS and multilayer ceramic technologies. The fabricated motor is 4.2 [mm] in diameter and 6.0 [mm] in height, runs at 1080 rpm, and has a consumption power of 0.11 [W]. The air turbine generator is 10.6 [mm] long, 10.6 [mm] wide, and 3.6 [mm] high. Connected to a 4 [Ω] load resistor, its output power is 195 [μVA] at a rotational speed of 9000 rpm.

Design of Miniature Electromagnetic Induction Type MEMS Generators With Multilayer Ceramic Circuit

2015 ◽  
Author(s):  
Minami Takato ◽  
Hiroaki Endo ◽  
Yuji Yokozeki ◽  
Kazuaki Maezumi ◽  
Ken Saito ◽  
...  
Keyword(s):  
Rotational Motion ◽  
Electromagnetic Induction ◽  
Magnetic Circuit ◽  
Three Dimensional ◽  
Magnetic Core ◽  
Ceramic Technology ◽  
Micro Electro Mechanical Systems ◽  
Air Turbine ◽  
Induction Type ◽  
Multilayer Ceramic

This paper discusses the design of a miniature electromagnetic induction type air turbine generator with a multilayer ceramic magnetic circuit. The air turbine is fabricated using a micro electro mechanical systems (MEMS) process, which can form high-accuracy, high-aspect-ratio parts. The magnetic circuit is fabricated using a multilayer ceramic technology that can form a three-dimensional conductor pattern into which a magnetic material can be introduced. By combining these technologies, a miniature generator comprising a miniature magnetic circuit with a helical conductor structure and magnetic core is achieved. In this study, a three-phase and a single-phase generator were fabricated, which produced rotational motion and output waveforms. In this paper, the generators are discussed with respect to the rotational motion and the shape of the magnetic circuit.

scholarly journals Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR

Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 69
Author(s):  
Yong Hua ◽  
Shuangyuan Wang ◽  
Bingchu Li ◽  
Guozhen Bai ◽  
Pengju Zhang
Keyword(s):  
Dynamic Model ◽  
Optical Switching ◽  
Control Method ◽  
Sliding Mode ◽  
Algorithm Design ◽  
Coupling Model ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
Torsional Micromirror ◽  
Dynamic Coupling Model

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure, and low energy consumption. However, MEMS micromirrors face severe disturbances due to vehicular vibrations in realistic use situations. The paper deals with the precise motion control of MEMS micromirrors, considering external vibration. A dynamic model of MEMS micromirrors, considering the coupling between vibration and torsion, is proposed. The coefficients in the dynamic model were identified using the experimental method. A feedforward sliding mode control method (FSMC) is proposed in this paper. By establishing the dynamic coupling model of electromagnetic MEMS torsional micromirrors, the proposed FSMC is evaluated considering external vibrations, and compared with conventional proportion-integral-derivative (PID) controls in terms of robustness and accuracy. The simulation experiment results indicate that the FSMC controller has certain advantages over a PID controller. This paper revealed the coupling dynamic of MEMS micromirrors, which could be used for a dynamic analysis and a control algorithm design for MEMS micromirrors.

scholarly journals Vascular Supply of the Human Spiral Ganglion: Novel Three-Dimensional Analysis Using Synchrotron Phase-Contrast Imaging and Histology

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Xueshuang Mei ◽  
Rudolf Glueckert ◽  
Annelies Schrott-Fischer ◽  
Hao Li ◽  
Hanif M. Ladak ◽  
...  
Keyword(s):  
Blood Supply ◽  
Phase Contrast ◽  
Spiral Ganglion ◽  
Three Dimensional ◽  
Vascular Anatomy ◽  
Helical Structure ◽  
Vascular Supply ◽  
Phase Contrast Imaging ◽  
Contrast Imaging ◽  
Temporal Bones

AbstractHuman spiral ganglion (HSG) cell bodies located in the bony cochlea depend on a rich vascular supply to maintain excitability. These neurons are targeted by cochlear implantation (CI) to treat deafness, and their viability is critical to ensure successful clinical outcomes. The blood supply of the HSG is difficult to study due to its helical structure and encasement in hard bone. The objective of this study was to present the first three-dimensional (3D) reconstruction and analysis of the HSG blood supply using synchrotron radiation phase-contrast imaging (SR-PCI) in combination with histological analyses of archival human cochlear sections. Twenty-six human temporal bones underwent SR-PCI. Data were processed using volume-rendering software, and a representative three-dimensional (3D) model was created to allow visualization of the vascular anatomy. Histologic analysis was used to verify the segmentations. Results revealed that the HSG is supplied by radial vascular twigs which are separate from the rest of the inner ear and encased in bone. Unlike with most organs, the arteries and veins in the human cochlea do not follow the same conduits. There is a dual venous outflow and a modiolar arterial supply. This organization may explain why the HSG may endure even in cases of advanced cochlear pathology.

Numerical exploration on snap buckling of a pre-stressed hemispherical gridshell

2021 ◽  
pp. 1-11
Author(s):  
Weicheng Huang ◽  
Longhui Qin ◽  
Qiang Chen
Keyword(s):  
Three Dimensional ◽  
Energy Functional ◽  
Elastic Rods ◽  
Geometrically Nonlinear ◽  
Local Response ◽  
Micro Electro Mechanical Systems ◽  
One Dimensional ◽  
Numerical Exploration ◽  
Planar Grid ◽  
Fundamental Understanding

Abstract Motivated by the observations of snap-through phenomena in pre-stressed strips and curved shells, we numerically investigate the snapping of a pre-buckled hemispherical gridshell under apex load indentation. Our experimentally validated numerical framework on elastic gridshell simulation combines two components: (i) Discrete Elastic Rods method, for the geometrically nonlinear description of one dimensional rods; and (ii) a naive penalty-based energy functional, to perform the non-deviation condition between two rods at joint. An initially planar grid of slender rods can be actuated into a three dimensional hemispherical shape by loading its extremities through a prescribed path, known as buckling induced assembly; next, this pre-buckled structure can suddenly change its bending direction at some threshold points when compressing its apex to the other side. We find that the hemispherical gridshell can undergo snap-through buckling through two different paths based on two different apex loading conditions. The first critical snap-through point slightly increases as the number of rods in gridshell structure becomes denser, which emphasizes the mechanically nonlocal property in hollow grids, in contrast to the local response of continuum shells. The findings may bridge the gap among rods, grids, knits, and shells, for a fundamental understanding of a group of thin elastic structures, and inspire the design of novel micro-electro-mechanical systems and functional metamaterials.

A self-developed indoor three-dimensional pedestrian localization platform based on MEMS sensors

Sensor Review ◽  
2015 ◽  
Vol 35 (2) ◽  
pp. 157-167 ◽  
Author(s):  
Shengbo Sang ◽  
Ruiyong Zhai ◽  
Wendong Zhang ◽  
Qirui Sun ◽  
Zhaoying Zhou
Keyword(s):  
Low Cost ◽  
Angular Rate ◽  
Three Dimensional ◽  
Dead Reckoning ◽  
Rate Data ◽  
Mems Sensors ◽  
Micro Electro Mechanical Systems ◽  
Content Type ◽  
Position Errors ◽  
Low Performance

Purpose – This study aims to design a new low-cost localization platform for estimating the location and orientation of a pedestrian in a building. The micro-electro-mechanical systems (MEMS) sensor error compensation and the algorithm were improved to realize the localization and altitude accuracy. Design/methodology/approach – The platform hardware was designed with common low-performance and inexpensive MEMS sensors, and with a barometric altimeter employed to augment altitude measurement. The inertial navigation system (INS) – extended Kalman filter (EKF) – zero-velocity updating (ZUPT) (INS-EKF-ZUPT [IEZ])-extended methods and pedestrian dead reckoning (PDR) (IEZ + PDR) algorithm were modified and improved with altitude determined by acceleration integration height and pressure altitude. The “AND” logic with acceleration and angular rate data were presented to update the stance phases. Findings – The new platform was tested in real three-dimensional (3D) in-building scenarios, achieved with position errors below 0.5 m for 50-m-long route in corridor and below 0.1 m on stairs. The algorithm is robust enough for both the walking motion and the fast dynamic motion. Originality/value – The paper presents a new self-developed, integrated platform. The IEZ-extended methods, the modified PDR (IEZ + PDR) algorithm and “AND” logic with acceleration and angular rate data can improve the high localization and altitude accuracy. It is a great support for the increasing 3D location demand in indoor cases for universal application with ordinary sensors.

Solvent-Based Polymer Swelling Characterization for the Development of the Nano/Micro-Particle Polymer Composite MEMS Corrosion Sensor

2014 ◽  
Author(s):  
Feng Pan ◽  
Abdoul Kader Maiga ◽  
Po-Hao Adam Huang
Keyword(s):  
Reaction Products ◽  
Material Transport ◽  
Sensing Element ◽  
Micro Electro Mechanical Systems ◽  
Polymer Swelling ◽  
Corrosion Sensor ◽  
Mems Technology ◽  
New Type ◽  
Oxide Removal

The concept of using Micro-Electro-Mechanical Systems (MEMS) for in-situ corrosion sensing and for long-term applications has been proposed and is currently under development by our research lab. This is a new type of sensing using MEMS technology and, to the knowledge of our team, has not been explored previously. The MEMS corrosion sensor is based on the oxidation of metal nano/micro-particle embedded in elastomeric polymer to form a composite sensing element. The polymer controls the diffusion into and out of the sensor while the corrosion of the metal particles inhibits electrical conduction which is used as the detection signal. The work presented here is based on part of the methods developed for the removal of native and process-induced metal oxides. A major aspect is the study of the swelling dynamics of the polymer matrix (polydimethylsiloxane, PDMS) intended for enhancing material transport of etchants into and reaction products out of the composite during oxide removal. More specifically, the characterization of the swelling of copper particles-PDMS composite samples in liquid solvent baths is presented.

scholarly journals A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities

Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1375
Author(s):  
Junji Pu ◽  
Kai Zeng ◽  
Yulie Wu ◽  
Dingbang Xiao
Keyword(s):  
Light Source ◽  
Optical System ◽  
High Sensitivity ◽  
Measurement Range ◽  
Optical Force ◽  
Zero Bias ◽  
Micro Electro Mechanical Systems ◽  
Force Effect ◽  
High Measurement ◽  
Mems Technology

In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.

scholarly journals Micro-electro-mechanical systems (MEMS): Technology for the 21st century

2014 ◽  
Vol 68 (5) ◽  
pp. 629-641 ◽  
Author(s):  
Tatjana Djakov ◽  
Ivanka Popovic ◽  
Ljubinka Rajakovic
Keyword(s):  
21St Century ◽  
Low Cost ◽  
Mechanical Systems ◽  
Modern Society ◽  
Global Scale ◽  
Thermal Constant ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Industrial Sectors ◽  
Mems Technology

Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

scholarly journals On-Demand MEMS Device Production System by Module-Based Microfactory

2010 ◽  
Vol 4 (2) ◽  
pp. 110-116 ◽  
Author(s):  
Kiwamu Ashida ◽  
◽  
Shizuka Nakano ◽  
Jaehyuk Park ◽  
Jun Akedo
Keyword(s):  
Production System ◽  
High Performance ◽  
Thin Sheet ◽  
Aerosol Deposition ◽  
Micro Electro Mechanical Systems ◽  
Unit Process ◽  
On Demand ◽  
Mems Technology ◽  
Thin Sheet Metal ◽  
Mems Device

Many micro-scale devices have been developed by applying micro-electro-mechanical systems (MEMS) technology, but MEMS production facilities are large and costly, making it difficult to develop small numbers of trial devices. The novel on-demand MEMS device production system we developed applies two major concepts – that of the microfactory and the introduction of non-MEMS processes in microfabrication. These two concepts have made manufacturing more ecological, economical, agile, and flexible through downsizing, forming an automated production line by connecting standardized unit-processing cells, each of which has a desktop process, a part transfer robot, and a standardized connection interface. These enable any process cell to be connected in any sequence that the target product requires. Four unit-process cells were developed – the micropress cell for fabricating microstructures from thin sheet metal and the miniature aerosol deposition (AD) process cell for fabricating high-performance piezoelectric (PZT) ceramics actuators. The feasibility of the on-demand MEMS production system was demonstrated by the fabrication of a MEMS-like micromirror scanner, proving the potential of on-demand MEMS production in diversified small-lot production.

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