Thermal Conductivity Measurement of Cobalt-Iron Thin Films Using the Time-Resolved Thermoreflectance Technique
Keyword(s):
Using the time–resolved thermoreflectance technique, the thermal conductivity of CoFe films are measured with various thicknesses and the results show a thickness-dependent thermal conductivity. In order to overcome the obstacle for the high thermal conductivity metal film measurement, a thermal barrier (SiNx) is added between the metal film and Si substrate.
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