Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1493788 ◽

2002 ◽

Vol 20 (4) ◽

pp. 1748 ◽

Author(s):

G. B. Rayner ◽

D. Kang ◽

Y. Zhang ◽

G. Lucovsky

Keyword(s):

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Composition Dependence ◽

X Ray ◽

Zirconium Silicate

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A correlation of Auger electron spectroscopy, x‐ray photoelectron spectroscopy, and Rutherford backscattering spectrometry measurements on sputter‐deposited titanium nitride thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574092 ◽

1986 ◽

Vol 4 (6) ◽

pp. 2463-2469 ◽

Author(s):

Brad J. Burrow ◽

Alan E. Morgan ◽

Russell C. Ellwanger

Keyword(s):

Titanium Nitride ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Rutherford Backscattering Spectrometry ◽

Rutherford Backscattering ◽

X Ray ◽

Sputter Deposited

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Analysis of Surfaces and Thin Films by Using Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

Journal of the Korean Physical Society ◽

10.3938/jkps.51.925 ◽

2007 ◽

Vol 51 (3) ◽

pp. 925 ◽

Author(s):

John T. Grant

Keyword(s):

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

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Auger electron spectroscopy/x‐ray photoelectron spectroscopy study of Ti–B–N thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579743 ◽

1995 ◽

Vol 13 (3) ◽

pp. 1633-1638 ◽

Author(s):

M. A. Baker ◽

A. Steiner ◽

J. Haupt ◽

W. Gissler

Keyword(s):

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

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Characterization of thin films on the nanometer scale by Auger electron spectroscopy and X-ray photoelectron spectroscopy

Applied Surface Science ◽

10.1016/j.apsusc.2004.06.012 ◽

2005 ◽

Vol 239 (3-4) ◽

pp. 470-480 ◽

Author(s):

C.J. Powell ◽

A. Jablonski ◽

W.S.M. Werner ◽

W. Smekal

Keyword(s):

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Nanometer Scale ◽

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Corrigendum to “Characterization of thin films on the nanometer scale by Auger electron spectroscopy and X-ray photoelectron spectroscopy”[Applied Surface Science 239 (2005) 470–480]

Applied Surface Science ◽

10.1016/s0169-4332(05)00046-2 ◽

2005 ◽

Vol 242 (3-4) ◽

pp. 219

Author(s):

C POWELL ◽

A JABLONSKI ◽

W WERNER ◽

W SMEKAL

Keyword(s):

Auger Electron Spectroscopy ◽

Surface Science ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Nanometer Scale ◽

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An x‐ray photoelectron spectroscopy/Auger electron spectroscopy study of titanium–palladium thin films on silicon(111)

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574576 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1617-1620

Author(s):

J. H. Thomas ◽

D. M. Hoffman ◽

J. T. McGinn ◽

F. J. Tams

Keyword(s):

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

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Corrigendum to “Characterization of thin films on the nanometer scale by Auger electron spectroscopy and X-ray photoelectron spectroscopy”

Applied Surface Science ◽

10.1016/j.apsusc.2005.01.021 ◽

2005 ◽

Vol 242 (3-4) ◽

pp. 219 ◽

Author(s):

C.J. Powell ◽

A. Jablonski ◽

W.S.M. Werner ◽

W. Smekal

Keyword(s):

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Nanometer Scale ◽

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Auger electron spectroscopy, X-ray photoelectron spectroscopy, work function measurements and photoemission of adsorbed xenon on thin films of Pt-Re(111) alloys

Thin Solid Films ◽

10.1016/0040-6090(87)90239-2 ◽

1987 ◽

Vol 151 (2) ◽

pp. 251-262 ◽

Author(s):

M. Alnot ◽

V. Gorodetskii ◽

A. Cassuto ◽

J.J. Ehrhardt

Keyword(s):

Auger Electron Spectroscopy ◽

Work Function ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser

10.3403/30124424 ◽

2005 ◽

Keyword(s):

Chemical Analysis ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Chemical ◽

X Ray ◽

Resolution Analysis ◽

Surface Chemical Analysis

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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Methods used to determine peak intensities and information required when reporting results

10.3403/30242215 ◽

2011 ◽

Keyword(s):

Chemical Analysis ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Chemical ◽

X Ray ◽

Surface Chemical Analysis

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