Experimental study on a new sterilization process using plasma source ion implantation with N2 gas

2003 ◽  
Vol 21 (4) ◽  
pp. 1230-1236 ◽  
Author(s):  
M. Yoshida ◽  
T. Tanaka ◽  
S. Watanabe ◽  
T. Takagi ◽  
M. Shinohara ◽  
...  
Keyword(s):  
Experimental Study ◽  
Ion Implantation ◽  
Plasma Source ◽  
Plasma Source Ion Implantation ◽  
Sterilization Process

scholarly journals Sterilization Process by Plasma Source Ion Implantation Using Inactive Gas

Shinku ◽  
2003 ◽  
Vol 46 (3) ◽  
pp. 333-336 ◽  
Author(s):  
Satoshi WATANABE ◽  
Teppei HIRAOKA ◽  
Satoshi HONDA ◽  
Takeshi TANAKA ◽  
Toshinori TAKAGI ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Plasma Source ◽  
Plasma Source Ion Implantation ◽  
Sterilization Process

Recent results in plasma source ion implantation

1992 ◽  
Author(s):  
JOHN CONRAD ◽  
M. ABUZRIBA ◽  
J. BLANCHARD ◽  
D. CHAPEK ◽  
A. CHEN ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Plasma Source ◽  
Plasma Source Ion Implantation

Boron doping of silicon by plasma source ion implantation

1997 ◽  
Vol 93 (2-3) ◽  
pp. 247-253 ◽  
Author(s):  
R.J. Matyi ◽  
D.L. Chapek ◽  
D.P. Brunco ◽  
S.B. Felch ◽  
B.S. Lee
Keyword(s):  
Ion Implantation ◽  
Boron Doping ◽  
Plasma Source ◽  
Plasma Source Ion Implantation

scholarly journals Distribution of incident ions and retained dose analysis for a wedge‐shaped target in plasma source ion implantation

1995 ◽  
Vol 77 (3) ◽  
pp. 1015-1019 ◽  
Author(s):  
Shamim M. Malik ◽  
D. E. Muller ◽  
K. Sridharan ◽  
R. P. Fetherston ◽  
Ngoc Tran ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Plasma Source ◽  
Plasma Source Ion Implantation
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