Simulating fluid flow characteristics during the scanning process for immersion lithography

2003 ◽  
Vol 21 (6) ◽  
pp. 2788 ◽  
Author(s):  
A. Wei ◽  
A. Abdo ◽  
G. Nellis ◽  
R. Engelstad ◽  
J. Chang ◽  
...  
Keyword(s):  
Fluid Flow ◽  
Flow Characteristics ◽  
Immersion Lithography ◽  
Scanning Process ◽  
Fluid Flow Characteristics

Numerical study of influence of casting speed on fluid flow characteristics in the four strand tundish

2021 ◽  
Author(s):  
Kridsanapong Boonpen ◽  
Pruet Kowitwarangkul ◽  
Patiparn Ninpetch ◽  
Nadnapang Phophichit ◽  
Piyapat Chuchuay ◽  
...  
Keyword(s):  
Fluid Flow ◽  
Casting Speed ◽  
Numerical Study ◽  
Flow Characteristics ◽  
Fluid Flow Characteristics
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