Effect of substrate material and bias on properties of TiN films deposited in the hybrid plasma reactor

2006 ◽  
Vol 24 (4) ◽  
pp. 1655-1659 ◽  
Author(s):  
L. Bárdos ◽  
H. Baránková ◽  
L.-E. Gustavsson
1984 ◽  
Vol 122 (2) ◽  
pp. 115-129 ◽  
Author(s):  
M.K. Hibbs ◽  
B.O. Johansson ◽  
J.-E. Sundgren ◽  
U. Helmersson

1996 ◽  
Vol 39 (1) ◽  
pp. 134-140 ◽  
Author(s):  
Seong Won NAM ◽  
Hideya NISHIYAMA ◽  
Shin-ichi KAMIYAMA

2021 ◽  
pp. 131736
Author(s):  
Xiaoping Wang ◽  
Jie Mei ◽  
Jihang Luo ◽  
Yunzhu Huang ◽  
Dionysios D. Dionysiou

2016 ◽  
Vol 70 (8) ◽  
pp. 104-108 ◽  
Author(s):  
A. Ayrapetov ◽  
◽  
E. Kralkina ◽  
P. Neklyudova ◽  
V. Odinokov ◽  
...  
Keyword(s):  

2018 ◽  
Vol 156 ◽  
pp. 06012 ◽  
Author(s):  
I. Istadi ◽  
Luqman Buchori ◽  
Brigitta B.T. Putri ◽  
Henrikus I.A. Hantara

This research is aimed to study the effect of catalyst pellet-diameter and catalyst basicity on the transesterification process of soybean oil into biodiesel over a hybrid catalytic-plasma reactor. Various catalyst diameters (3, 5, and 7 mm) were tested in this reaction system. Catalyst basicity was also examined by comparing fresh and used catalyst as well as with and without K2O promoter. All catalysts testing were performed in a hybrid plasma-catalytic reactor (dielectric barrier discharge – DBD type). From the results, the synergistic effects roles of the catalyst and the plasma in the transesterification process are important, in which the energetic electrons within plasma assist the reaction on the catalyst surface by an exciting bonded electron. The catalyst basicity was influenced by the composition of CaO on the catalyst as well as roles of the alkaline K2O promoter. Catalyst basicity is important in producing biodiesel with high performance. Yield of fatty acid alkyl ester (FAAE) or biodiesel is slightly influenced by the catalyst diameter within the range of diameter studied.


1990 ◽  
Vol 188 ◽  
Author(s):  
V. Raman ◽  
R. Berriche

ABSTRACTTin films were deposited on silicon substrates by RF diode sputtering and the growth behavior of these films were characterized by scanning electron microscopy. The time dependent plastic flow behavior in these films were examined by performing indentation tests using a dcpth-scnsing hardness testing machine. Individual indentation experiments with different constant load segments were conducted and the creep characteristics of both sputtered films and bulk Sn were examined. The stress exponents determined from these tests were compared with those determined for bulk Sn from conventional creep tests. The influence of the substrate material on the creep properties of the film are described.


2009 ◽  
Author(s):  
Gary B. Josephson ◽  
Russell G. Tonkyn ◽  
Kenneth G. Rappe ◽  
John G. Frye

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