Sub-50nm resolution surface electron emission lithography using nano-Si ballistic electron emitter
2008 ◽
Vol 26
(6)
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pp. 2064-2068
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2021 ◽
Vol 312
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pp. 110807
Keyword(s):
2004 ◽
Vol 22
(4)
◽
pp. 1784
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Keyword(s):
2001 ◽
Vol 66
(1-2)
◽
pp. 3-51
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1992 ◽
Vol 10
(6)
◽
pp. 3112
◽
Keyword(s):