Characterization in Silicon Processing
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9780080523422

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Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50046-2 ◽

1993 ◽

pp. 233-240

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Variable-Angle Spectroscopic Ellipsometry (VASE)

Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50042-5 ◽

1993 ◽

pp. 229

Keyword(s):

Spectroscopic Ellipsometry ◽

Variable Angle ◽

Variable Angle Spectroscopic Ellipsometry

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Transmission Electron Microscopy (TEM)

Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50041-3 ◽

1993 ◽

pp. 228

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Transmission Electron

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Reflection High-Energy Electron Diffraction (RHEED)

Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50031-0 ◽

1993 ◽

pp. 203

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

High Energy Electron

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Photoluminescence (PL)

Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50029-2 ◽

1993 ◽

pp. 201

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Dynamic Secondary Ion Mass Spectrometry (Dynamic SIMS)

Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50018-8 ◽

1993 ◽

pp. 181

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Ballistic Electron Emission Microscopy (BEEM)

Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50015-2 ◽

1993 ◽

pp. 170-176

Author(s):

PHILIPP NIEDERMANN

Keyword(s):

Electron Emission ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Auger Electron Spectroscopy (AES)

Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50014-0 ◽

1993 ◽

pp. 169

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron

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Barrier Films

Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50012-7 ◽

1993 ◽

pp. 138-166

Author(s):

M. LAWRENCE ◽

A. DASS

Keyword(s):

Barrier Films

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Tungsten-Based Conductors

Characterization in Silicon Processing ◽

10.1016/b978-0-08-052342-2.50011-5 ◽

1993 ◽

pp. 121-137

Author(s):

ROC BLUMENTHAL ◽

GREGORY C. SMITH

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