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Characterization in Silicon Processing
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TOTAL DOCUMENTS
46
(FIVE YEARS 0)
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2
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Published By Elsevier
9780080523422
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Index
Characterization in Silicon Processing
◽
10.1016/b978-0-08-052342-2.50046-2
◽
1993
◽
pp. 233-240
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Variable-Angle Spectroscopic Ellipsometry (VASE)
Characterization in Silicon Processing
◽
10.1016/b978-0-08-052342-2.50042-5
◽
1993
◽
pp. 229
Keyword(s):
Spectroscopic Ellipsometry
◽
Variable Angle
◽
Variable Angle Spectroscopic Ellipsometry
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Transmission Electron Microscopy (TEM)
Characterization in Silicon Processing
◽
10.1016/b978-0-08-052342-2.50041-3
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1993
◽
pp. 228
Keyword(s):
Electron Microscopy
◽
Transmission Electron Microscopy
◽
Transmission Electron
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Reflection High-Energy Electron Diffraction (RHEED)
Characterization in Silicon Processing
◽
10.1016/b978-0-08-052342-2.50031-0
◽
1993
◽
pp. 203
Keyword(s):
Electron Diffraction
◽
High Energy
◽
Energy Electron
◽
High Energy Electron
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Photoluminescence (PL)
Characterization in Silicon Processing
◽
10.1016/b978-0-08-052342-2.50029-2
◽
1993
◽
pp. 201
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Dynamic Secondary Ion Mass Spectrometry (Dynamic SIMS)
Characterization in Silicon Processing
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10.1016/b978-0-08-052342-2.50018-8
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1993
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pp. 181
Keyword(s):
Mass Spectrometry
◽
Secondary Ion Mass Spectrometry
◽
Ion Mass Spectrometry
◽
Secondary Ion
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Ballistic Electron Emission Microscopy (BEEM)
Characterization in Silicon Processing
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10.1016/b978-0-08-052342-2.50015-2
◽
1993
◽
pp. 170-176
Author(s):
PHILIPP NIEDERMANN
Keyword(s):
Electron Emission
◽
Ballistic Electron Emission Microscopy
◽
Ballistic Electron
◽
Emission Microscopy
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Auger Electron Spectroscopy (AES)
Characterization in Silicon Processing
◽
10.1016/b978-0-08-052342-2.50014-0
◽
1993
◽
pp. 169
Keyword(s):
Auger Electron Spectroscopy
◽
Electron Spectroscopy
◽
Auger Electron
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Barrier Films
Characterization in Silicon Processing
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10.1016/b978-0-08-052342-2.50012-7
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1993
◽
pp. 138-166
Author(s):
M. LAWRENCE
◽
A. DASS
Keyword(s):
Barrier Films
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Tungsten-Based Conductors
Characterization in Silicon Processing
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10.1016/b978-0-08-052342-2.50011-5
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1993
◽
pp. 121-137
Author(s):
ROC BLUMENTHAL
◽
GREGORY C. SMITH
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