A Novel Sample Preparation Method for Frontside Inspection of GaN Devices after Backside Analysis

Frontside die inspection by Scanning Electron Microscopy (SEM) is critical to investigate failures that appear dispersed over the GaN die surface and that will be very difficult to localize by the typical Focus Ion Beam (FIB) or Transmission Electron Microscopy (TEM) analysis. Frontside sample preparation is; however, extremely challenging if the device was already subjected to sample preparation for backside Photo Emission Microscopy (PEM). In this paper, a novel sample preparation method is presented where all front side layers are removed and only the 5μm GaN die is left for inspection.

Photon Emission Microscopy of HfO2 ReRAM Cells

In this paper, we discuss the use of spontaneous Photon Emission Microscopy (PEM) for observing filaments formed in HfO2 Resistive Random Access Memory (ReRAM) cells. A CCD and an InGaAs camera can be used to quickly observe photon emission in both reverse (reset) and forward (set) bias conditions. An electric field model and a uniform Poisson spatial distribution model are used to explain the intensity and location of the experimental data. Single filament fluctuations and multiple filaments are also observed for the first time.

Commonality Analysis for Multiple Chain Integrity Failures

The aim of this paper is to disclose an alternative FA approach to handle complex cases, showing multiple chain failures with multiple candidates. Starting from a commonality layout analysis of candidates resulting from the diagnosis, it is possible to identify a common interconnection shared between the several candidates, already at schematic level. The effectiveness of such analysis has been successfully verified by means of a photo-emission microscopy (PEM) analysis, while running scan chain patterns and by physical analysis.

Fault Isolation Approaches for Nanoscale TSV Interconnects in 3D Heterogenous Integration

We report optical and electron beam-based fault isolation approaches for short and open defects in nanometer scale through silicon via (TSV) interconnects (180×250 nm, 500 nm height). Short defects are localized by photon emission microscopy (PEM) and optical beam-induced current (OBIC) techniques, and open defects are isolated by active voltage contrast imaging in the scanning electron microscope (SEM). We confirm our results by transmission electron microscopy (TEM) based cross sectioning.

Non-Visual Defect Identification by Dopant Analysis Method in FinFET Devices

For a specific IDDQ failure only around SRAM cell boundary, we conducted a systematic investigation in the lab involving electrical, physical, and chemical analysis. Following electrical test locating the failure area according to PEM (photon emission microscopy) and physical defect analysis resulting in NDF (no defect found), we explored an alternative method to define the failure. In this paper, we demonstrated the success of using tunneling AFM (TUNA) in diagnosing such an IDDQ failure occurring in FinFET devices. AFM (TUNA) analysis was able to visualize clearly the dopant discrepancies in comparison between the IDDQ fail and pass references in FinFET transistors. The dopant abnormalities indicated the current IDDQ fail was caused by processes that impaired the dopant implantation.

High-resolution positron emission microscopy of patient-derived tumor organoids

Tumor organoids offer new opportunities for translational cancer research, but unlike animal models, their broader use is hindered by the lack of clinically relevant imaging endpoints. Here, we present a positron-emission microscopy method for imaging clinical radiotracers in patient-derived tumor organoids with spatial resolution 100-fold better than clinical positron emission tomography (PET). Using this method, we quantify 18F-fluorodeoxyglucose influx to show that patient-derived tumor organoids recapitulate the glycolytic activity of the tumor of origin, and thus, could be used to predict therapeutic response in vitro. Similarly, we measure sodium-iodine symporter activity using 99mTc- pertechnetate and find that the iodine uptake pathway is functionally conserved in organoids derived from thyroid carcinomas. In conclusion, organoids can be imaged using clinical radiotracers, which opens new possibilities for identifying promising drug candidates and radiotracers, personalizing treatment regimens, and incorporating clinical imaging biomarkers in organoid-based co-clinical trials.