Drude and Kukharskii mobility of doped semiconductors extracted from Fourier-transform infrared ellipsometry spectra

Doped Semiconductors ◽

Investigations of the surface chemistry of silicon substrates etched in a rf-biased inductively coupled fluorocarbon plasma using Fourier-transform infrared ellipsometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580976 ◽

1998 ◽

Vol 16 (1) ◽

pp. 225-232 ◽

Cited By ~ 10

Author(s):

G. M. W. Kroesen ◽

Ho-Jun Lee ◽

Hiroshi Moriguchi ◽

Hideki Motomura ◽

Tatsuru Shirafuji ◽

...

Keyword(s):

Fourier Transform ◽

Surface Chemistry ◽

Silicon Substrates ◽

Inductively Coupled ◽

Infrared Ellipsometry ◽

Fluorocarbon Plasma

Application of Fourier-transform infrared ellipsometry to quantify bioloical molecules in animal tissues

10.1117/12.460790 ◽

2002 ◽

Cited By ~ 1

Author(s):

Enric Garcia-Caurel ◽

Bernard Drevillon ◽

Laurent Schwartz

Keyword(s):

Fourier Transform ◽

Animal Tissues ◽

Fourier transform infrared ellipsometry of thin polymer films

Analytical Chemistry ◽

10.1021/ac00292a016 ◽

1986 ◽

Vol 58 (1) ◽

pp. 64-68 ◽

Cited By ~ 20

Author(s):

Robert T. Graf ◽

Jack L. Koenig ◽

Hatsuo. Ishida

Keyword(s):

Fourier Transform ◽

Polymer Films ◽

Thin Polymer Films ◽

Infrared Ellipsometry ◽

Thin Polymer

Fourier Transform Infrared Ellipsometry Of Thin Polymer Films

10.1117/12.970736 ◽

1985 ◽

Cited By ~ 1

Author(s):

R . T. Graf ◽

J. L. Koenig ◽

H. Ishida

Keyword(s):

Fourier Transform ◽

Polymer Films ◽

Thin Polymer Films ◽

Infrared Ellipsometry ◽

Thin Polymer

Observations of Silicon Surfaces Exposed to Inductively Coupled CHF3and C4F8/H2Plasmas Using Fourier Transform Infrared Ellipsometry

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4522 ◽

1998 ◽

Vol 37 (Part 1, No. 8) ◽

pp. 4522-4526 ◽

Cited By ~ 7

Author(s):

Ho-Jun Lee ◽

Hideki Motomura ◽

Kunihide Tachibana

Keyword(s):

Fourier Transform ◽

Silicon Surfaces ◽

Inductively Coupled ◽

Application of Fourier transform infrared ellipsometry to assess the concentration of biological molecules

Applied Optics ◽

10.1364/ao.41.007339 ◽

2002 ◽

Vol 41 (34) ◽

pp. 7339 ◽

Cited By ~ 15

Author(s):

Enric Garcia-Caurel ◽

Bernard Drévillon ◽

Antonello De Martino ◽

Laurent Schwartz

Keyword(s):

Fourier Transform ◽

Biological Molecules ◽

Vibrational properties of bulk LaAlO3 from Fourier-transform infrared ellipsometry

Thin Solid Films ◽

10.1016/j.tsf.2013.11.140 ◽

2014 ◽

Vol 571 ◽

pp. 620-624 ◽

Cited By ~ 11

Author(s):

Travis Willett-Gies ◽

Eric DeLong ◽

Stefan Zollner

Keyword(s):

Fourier Transform ◽

Vibrational Properties ◽

Silicon surfaces treated by CF4, CF4/H2, and CF4/O2 rf plasmas: Study by in situ Fourier transform infrared ellipsometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580514 ◽

1997 ◽

Vol 15 (2) ◽

pp. 209-215 ◽

Cited By ~ 9

Author(s):

Tatsuru Shirafuji ◽

Winfred W. Stoffels ◽

Hiroshi Moriguchi ◽

Kunihide Tachibana

Keyword(s):

Fourier Transform ◽

Silicon Surfaces ◽

Rf Plasmas ◽

The Development Of Fourier Transform Infrared Ellipsometry.

10.1117/12.969513 ◽

1989 ◽

Author(s):

O. Hunderi ◽

J. Bremer ◽

Kong Fanping

Keyword(s):

Fourier Transform ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Optical determination of shallow carrier profiles using Fourier transform infrared ellipsometry

10.1116/1.589802 ◽

1998 ◽

Vol 16 (1) ◽

pp. 312 ◽

Cited By ~ 31

Author(s):

Thomas E. Tiwald

Keyword(s):

Fourier Transform ◽

Infrared Ellipsometry ◽

Optical Determination