Chrome mask fabrication with electron‐beam‐lithographic system

1978 ◽  
Vol 15 (3) ◽  
pp. 948-952 ◽  
Author(s):  
C. H. Ting ◽  
R. L. Anderson ◽  
D. Y. Saiki ◽  
A. J. Kraft
Keyword(s):  
Electron Beam ◽  
Chrome Mask ◽  
Mask Fabrication

A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes

1991 ◽  
Vol 13 (1-4) ◽  
pp. 165-172 ◽  
Author(s):  
M.G. Rosenfield ◽  
S.A. Rishton ◽  
D.P. Kern ◽  
D.E. Seeger ◽  
C.A. Whiting
Keyword(s):  
Electron Beam ◽  
Proximity Effects ◽  
High Electron ◽  
X Ray ◽  
Mask Fabrication

Particle Contamination Control Technology in Electron Beam Mask Writing System for Next-Generation Mask Fabrication

2002 ◽  
Vol 41 (Part 1, No. 9) ◽  
pp. 5835-5840
Author(s):  
Kiminobu Akeno ◽  
Munehiro Ogasawara ◽  
Kenji Ooki ◽  
Toru Tojo ◽  
Ryoichi Hirano ◽  
...  
Keyword(s):  
Electron Beam ◽  
Control Technology ◽  
Writing System ◽  
Next Generation ◽  
Contamination Control ◽  
Particle Contamination ◽  
Mask Fabrication

Electron Beam Mask Fabrication for MOSLSI's with 1.5 µm Design Rule

1980 ◽  
Vol 19 (S1) ◽  
pp. 51 ◽  
Author(s):  
Shinji Okazaki ◽  
Kozo Mochiji ◽  
Eiji Takeda ◽  
Yoji Maruyama
Keyword(s):  
Electron Beam ◽  
Design Rule ◽  
Mask Fabrication

Nanometer-Scale Direct Carbon Mask Fabrication Using Electron-Beam-Assisted Deposition

1993 ◽  
Vol 32 (Part 1, No. 12B) ◽  
pp. 6147-6152 ◽  
Author(s):  
Yukinori Ochiai ◽  
Heiji Watanabe ◽  
Jun-ichi Fujita ◽  
Masakazu Baba ◽  
Shoko Manako ◽  
...  
Keyword(s):  
Electron Beam ◽  
Nanometer Scale ◽  
Mask Fabrication

Improvement of Pattern and Position Accuracies by Multiple Electron Beam Writing for X-Ray Mask Fabrication

1993 ◽  
Vol 32 (Part 2, No. 11B) ◽  
pp. L1707-L1710 ◽  
Author(s):  
Sunao Aya ◽  
Kenji Marumoto ◽  
Hideki Yabe ◽  
Yasuji Matsui
Keyword(s):  
Electron Beam ◽  
X Ray ◽  
Mask Fabrication

Electron Beam Mask Fabrication for MOSLSI's with 1 μm - 1.5 μm Design Rules

1979 ◽  
Author(s):  
Shinji Okazaki ◽  
Kozo Mochiji ◽  
Eiji Takeda ◽  
Yoji Maruyama ◽  
Shojiro Asai
Keyword(s):  
Electron Beam ◽  
Design Rules ◽  
Mask Fabrication
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