Inspection of complete VLSI chips with a high resolution image recording system and large area SEM
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1997 ◽
Vol 185
(2)
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pp. 233-242
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1969 ◽
Vol 17
(5)
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pp. 162-169
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1970 ◽
Vol 28
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pp. 260-261
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1989 ◽
Vol 281
(5)
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pp. 336-341
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