X‐ray lithography by synchrotron radiation of the SOR‐RING storage ring

1979 ◽  
Vol 16 (6) ◽  
pp. 1939-1941 ◽  
Author(s):  
H. Aritome ◽  
S. Matsui ◽  
K. Moriwaki ◽  
S. Namba
Author(s):  
Tetsuya Ishikawa

The evolution of synchrotron radiation (SR) sources and related sciences is discussed to explain the ‘generation’ of the SR sources. Most of the contemporary SR sources belong to the third generation, where the storage rings are optimized for the use of undulator radiation. The undulator development allowed to reduction of the electron energy of the storage ring necessary for delivering 10 keV X-rays from the initial 6–8 GeV to the current 3 Gev. Now is the transitional period from the double-bend-achromat lattice-based storage ring to the multi-bend-achromat lattice to achieve much smaller electron beam emittance. Free electron lasers are the other important accelerator-based light sources which recently reached hard X-ray regime by using self-amplified spontaneous emission scheme. Future accelerator-based X-ray sources should be continuous wave X-ray free electron lasers and pulsed X-ray free electron lasers. Some pathways to reach the future case are discussed. This article is part of the theme issue ‘Fifty years of synchrotron science: achievements and opportunities’.


1983 ◽  
Vol 208 (1-3) ◽  
pp. 393-398 ◽  
Author(s):  
E.S. Gluskin ◽  
A.A. Krasnoperova ◽  
G.N. Kulipanov ◽  
V.P. Naz'mov ◽  
V.F. Pindjurin ◽  
...  

Author(s):  
A. D. Nikolenko ◽  
S. V. Avakyan ◽  
I. M. Afanas’ev ◽  
N. A. Voronin ◽  
N. V. Kovalenko ◽  
...  

2014 ◽  
Vol 21 (5) ◽  
pp. 1006-1010 ◽  
Author(s):  
Peter Denes ◽  
Bernd Schmitt

Dramatic advances in synchrotron radiation sources produce ever-brighter beams of X-rays, but those advances can only be used if there is a corresponding improvement in X-ray detectors. With the advent of storage ring sources capable of being diffraction-limited (down to a certain wavelength), advances in detector speed, dynamic range and functionality is required. While many of these improvements in detector capabilities are being pursued now, the orders-of-magnitude increases in brightness of diffraction-limited storage ring sources will require challenging non-incremental advances in detectors. This article summarizes the current state of the art, developments underway worldwide, and challenges that diffraction-limited storage ring sources present for detectors.


1985 ◽  
Vol 29 ◽  
pp. 243-250 ◽  
Author(s):  
W. Parrish ◽  
M. Hart ◽  
C. G. Erickson ◽  
N. Masciocchi ◽  
T. C. Huang

AbstractThe instrumentation developed for poly crystalline diffractometry using the storage ring at the Stanford Synchrotron Radiation Laboratory is described. A pair of automated vertical scan diffractometers was used for a Si (111) channel monochromator and the powder specimens. The parallel beam powder diffraction was defined by horizontal parallel slits which had several times higher intensity than a receiving slit at the same resolution. The patterns were obtained with 2:1 scanning with’ a selected monochromatic beam, and an energy dispersive diffraction method in which the monochromator is step-scanned, and the specimen and scintillation counter are fixed. Both methods use the same instrumentation.


1998 ◽  
Vol 5 (3) ◽  
pp. 627-629 ◽  
Author(s):  
U. Hahn ◽  
W. Brefeld ◽  
M. Hesse ◽  
J. R. Schneider ◽  
H. Schulte-Schrepping ◽  
...  

At the 12 GeV storage ring PETRA, the first synchrotron radiation beamline uses a 4 m-long undulator. The beamline, with a length of 130 m between source and sample, delivers hard X-ray photons usable up to 300 keV. The photon beam has a total power of 7 kW. Combined with the high brilliance, the powerful beam is very critical for all beamline components. Copper, located at a distance of 26 m, hit by the full undulator beam, melts within 20 ms. Different monitors are described for stable, safe and reliable operation of beam and experiments.


1981 ◽  
Vol 59 (11) ◽  
pp. 1811-1816
Author(s):  
J. B. A. Mitchell ◽  
J. Wm. McGowan ◽  
G. M. Bancroft

The 10 GeV CHEER electron storage ring will produce more than 1 MW of synchrotron radiation per turn with photon energies extending from the far infrared to the hard X-ray region. The critical energy of the synchrotron radiation spectrum will be 22 keV.Applications of hard X-rays to materials analysis are described and a discussion of some of the problems which will be encountered in implementing a synchrotron radiation facility at CHEER is presented.


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