A scanning tunneling microscope/scanning electron microscope system for the fabrication of nanostructures

1991 ◽  
Vol 9 (2) ◽  
pp. 1380 ◽  
Author(s):  
E. E. Ehrichs
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scanning Tunneling Microscope ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Scanning Electron

Design of Ultra High Vacuum Scanning Electron Microscope Combined with Scanning Tunneling Microscope

1992 ◽  
Vol 295 ◽  
Author(s):  
Mikio Takai ◽  
Naoki Yokoi ◽  
Ryou Mimura ◽  
Hiroshi Sawaragi ◽  
Ryuso Aihara
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Scanning Tunneling Microscope ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Electron Gun ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Wide Range ◽  
Scanning Electron

AbstractAn ultra high vacuum (UHV) scanning electron microscope (SEM) combined with a scanning tunneling microscope (STM) has been designed and constructed to solve problems, arising from STM surface imaging and nanofabrication using STM tips, such as difficulty in probe tip location and change in tip shape. The system facilitates to image and/or to modify a wide range of area from submicron down to subnanometer. A ZrO/W thermal emitter in a Schottky mode has been used for an electron gun to obtain a low energy spread with a high angular current density. Minimum beam spot diameters of 6 and 12 nm with currents of 100 pA and 4 nA are estimated by optical property calculation for high resolution (SEM) and high current (fabrication) modes, respectively.

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