Patterning accuracy estimation during stage acceleration in the electron beam direct writing system EX-8D

1996 ◽  
Vol 14 (6) ◽  
pp. 3985 ◽  
Author(s):  
K. Hattori
Keyword(s):  
Electron Beam ◽  
Writing System ◽  
Direct Writing ◽  
Accuracy Estimation

Patterning Accuracy Estimation of Electron Beam Direct-Writing System EX-8D

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6966-6970
Author(s):  
Kiyoshi Hattori ◽  
Shunko Magoshi ◽  
Hitoshi Sunaoshi ◽  
Hirotsugu Wada ◽  
Atsushi Ando ◽  
...  
Keyword(s):  
Electron Beam ◽  
Writing System ◽  
Direct Writing ◽  
Accuracy Estimation

Exposure characteristics of character projection-type low-energy electron-beam direct writing system

2007 ◽  
Author(s):  
Takayuki Satoh ◽  
Ryoichi Inanami ◽  
Katsumi Kishimoto ◽  
Keizo Hirose ◽  
Tetsuro Nakasugi ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Writing System ◽  
Direct Writing ◽  
Low Energy Electron

A character projection low energy electron beam direct writing system for device of small production lot with a variety of design

2006 ◽  
Author(s):  
Fumihiko Nakamura ◽  
Katsuhide Watanabe ◽  
Hidetoshi Kinoshita ◽  
Hiroyuki Shinozaki ◽  
Yasushi Kojima ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Writing System ◽  
Direct Writing ◽  
Low Energy Electron ◽  
Small Production

Alignment method of low-energy electron-beam direct writing system EBIS using voltage contrast image

2007 ◽  
Author(s):  
Takeshi Koshiba ◽  
Takumi Ota ◽  
Tetsuro Nakasugi ◽  
Fumihiko Nakamura ◽  
Katsuhide Watanabe ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Writing System ◽  
Alignment Method ◽  
Direct Writing ◽  
Low Energy Electron ◽  
Voltage Contrast ◽  
Contrast Image

Recent progress of a character projection-type low-energy electron-beam direct writing system

2007 ◽  
Author(s):  
Kouhei Noguchi ◽  
Katsuhide Watanabe ◽  
Hidetoshi Kinoshita ◽  
Hiroyuki Shinozaki ◽  
Yasushi Kojima ◽  
...  
Keyword(s):  
Electron Beam ◽  
Recent Progress ◽  
Low Energy ◽  
Energy Electron ◽  
Writing System ◽  
Direct Writing ◽  
Low Energy Electron

Development of Multibeam Electron Beam Direct Writing System Using Third-Order Imaging Technique

2009 ◽  
Vol 48 (6) ◽  
pp. 06FB01
Author(s):  
Takashi Fuse ◽  
Tadashi Kotsugi ◽  
Koji Takeya ◽  
Hidetoshi Kinoshita ◽  
N. William Parker
Keyword(s):  
Electron Beam ◽  
Imaging Technique ◽  
Writing System ◽  
Direct Writing ◽  
Third Order

Data conversion system for character projection-type low-energy electron beam direct writing system

2006 ◽  
Author(s):  
Ryoichi Inanami ◽  
Katsumi Kishimoto ◽  
Kazuhiro Nakai ◽  
Yoshikazu Ichioka ◽  
Kiyoshi Kitamura ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Data Conversion ◽  
Writing System ◽  
Direct Writing ◽  
Conversion System ◽  
Low Energy Electron

Electron optics using multipole lenses for a low energy electron beam direct writing system

2002 ◽  
Vol 20 (1) ◽  
pp. 25 ◽  
Author(s):  
Yuichiro Yamazaki ◽  
Osamu Nagano ◽  
Susumu Hashimoto ◽  
Atsushi Ando ◽  
Kazuyoshi Sugihara ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Electron Optics ◽  
Writing System ◽  
Direct Writing ◽  
Low Energy Electron
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