Alignment method of low-energy electron-beam direct writing system EBIS using voltage contrast image

2007 ◽  
Author(s):  
Takeshi Koshiba ◽  
Takumi Ota ◽  
Tetsuro Nakasugi ◽  
Fumihiko Nakamura ◽  
Katsuhide Watanabe ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Writing System ◽  
Alignment Method ◽  
Direct Writing ◽  
Low Energy Electron ◽  
Voltage Contrast ◽  
Contrast Image

Exposure characteristics of character projection-type low-energy electron-beam direct writing system

2007 ◽  
Author(s):  
Takayuki Satoh ◽  
Ryoichi Inanami ◽  
Katsumi Kishimoto ◽  
Keizo Hirose ◽  
Tetsuro Nakasugi ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Writing System ◽  
Direct Writing ◽  
Low Energy Electron

A character projection low energy electron beam direct writing system for device of small production lot with a variety of design

2006 ◽  
Author(s):  
Fumihiko Nakamura ◽  
Katsuhide Watanabe ◽  
Hidetoshi Kinoshita ◽  
Hiroyuki Shinozaki ◽  
Yasushi Kojima ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Writing System ◽  
Direct Writing ◽  
Low Energy Electron ◽  
Small Production

Recent progress of a character projection-type low-energy electron-beam direct writing system

2007 ◽  
Author(s):  
Kouhei Noguchi ◽  
Katsuhide Watanabe ◽  
Hidetoshi Kinoshita ◽  
Hiroyuki Shinozaki ◽  
Yasushi Kojima ◽  
...  
Keyword(s):  
Electron Beam ◽  
Recent Progress ◽  
Low Energy ◽  
Energy Electron ◽  
Writing System ◽  
Direct Writing ◽  
Low Energy Electron

Data conversion system for character projection-type low-energy electron beam direct writing system

2006 ◽  
Author(s):  
Ryoichi Inanami ◽  
Katsumi Kishimoto ◽  
Kazuhiro Nakai ◽  
Yoshikazu Ichioka ◽  
Kiyoshi Kitamura ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Data Conversion ◽  
Writing System ◽  
Direct Writing ◽  
Conversion System ◽  
Low Energy Electron

Electron optics using multipole lenses for a low energy electron beam direct writing system

2002 ◽  
Vol 20 (1) ◽  
pp. 25 ◽  
Author(s):  
Yuichiro Yamazaki ◽  
Osamu Nagano ◽  
Susumu Hashimoto ◽  
Atsushi Ando ◽  
Kazuyoshi Sugihara ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Electron Optics ◽  
Writing System ◽  
Direct Writing ◽  
Low Energy Electron

New registration technique using voltage-contrast images for low-energy electron-beam lithography

2001 ◽  
Author(s):  
Tetsuro Nakasugi ◽  
Atsushi Ando ◽  
Kazuyoshi Sugihara ◽  
Motosuke Miyoshi ◽  
Katsuya Okumura
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron ◽  
Voltage Contrast

Low-Energy Electron Beam Direct Writing Equipment

2007 ◽  
Vol 46 (9B) ◽  
pp. 6161-6165 ◽  
Author(s):  
Takashi Fuse ◽  
Atsushi Ando ◽  
Tadashi Kotsugi ◽  
Hidetoshi Kinoshita ◽  
Kazuyoshi Sugihara
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Direct Writing ◽  
Low Energy Electron
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