Fabrication of high-aspect-ratio InP-based vertical-cavity laser mirrors using CH[sub 4]/H[sub 2]/O[sub 2]/Ar reactive ion etching
1997 ◽
Vol 15
(6)
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pp. 2031
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Keyword(s):
2014 ◽
Vol 113
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pp. 35-39
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Keyword(s):
Keyword(s):
2002 ◽
Vol 20
(1)
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pp. 154
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2018 ◽
Vol 27
(4)
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pp. 686-697
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Keyword(s):
2017 ◽
Vol 9
(12)
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pp. 168781401773815
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Keyword(s):
Keyword(s):