C[sub 60]-incorporated nanocomposite resist system for practical nanometer pattern fabrication
1997 ◽
Vol 15
(6)
◽
pp. 2570
◽
Keyword(s):
1997 ◽
Vol 35
(1-4)
◽
pp. 113-116
◽
1997 ◽
Vol 36
(Part 1, No. 12B)
◽
pp. 7786-7790
◽
1997 ◽
Vol 36
(Part 1, No. 12B)
◽
pp. 7642-7645
◽
Keyword(s):
1991 ◽
Vol 13
(1-4)
◽
pp. 315-318
◽
2000 ◽
Vol 39
(Part 2, No. 10B)
◽
pp. L1068-L1070
◽
1984 ◽
Vol 23
(Part 2, No. 3)
◽
pp. L141-L143
◽