nanometer pattern
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scholarly journals DNA-Origami-Aided Lithography for Sub-10 Nanometer Pattern Printing

Proceedings ◽  
2017 ◽  
Vol 1 (4) ◽  
pp. 325 ◽  
Author(s):  
Isaac Gállego ◽  
Brendan Manning ◽  
Joan Daniel Prades ◽  
Mònica Mir ◽  
Josep Samitier ◽  
...  
Keyword(s):  
Dna Origami ◽  
Nanometer Pattern

Fullerene-Derivative Nanocomposite Resist for Nanometer Pattern Fabrication

2000 ◽  
Vol 39 (Part 2, No. 10B) ◽  
pp. L1068-L1070 ◽  
Author(s):  
Tetsuyoshi Ishii ◽  
Toshiaki Tamamura ◽  
Kiyotaka Shigehara
Keyword(s):  
Fullerene Derivative ◽  
Nanometer Pattern

Nanometer Pattern-Mask Fabricated by Conventional Photolithography

1997 ◽  
Vol 36 (Part 1, No. 12B) ◽  
pp. 7786-7790 ◽  
Author(s):  
Kouji Fujimaru ◽  
Takashi Ono ◽  
Ryuta Nagai ◽  
Hideki Matsumura
Keyword(s):  
Pattern Mask ◽  
Conventional Photolithography ◽  
Nanometer Pattern

High-Aspect-Ratio Nanometer-Pattern Fabrication Using Fullerene-Incorporated Nanocomposite Resists for Dry-Etching Application

1997 ◽  
Vol 36 (Part 1, No. 12B) ◽  
pp. 7642-7645 ◽  
Author(s):  
Tomohiro Shibata ◽  
Tetsuyoshi Ishii ◽  
Hiroshi Nozawa ◽  
Toshiaki Tamamura
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Dry Etching ◽  
Nanometer Pattern

A nano-composite resist system: A new approach to nanometer pattern fabrication

1997 ◽  
Vol 35 (1-4) ◽  
pp. 113-116 ◽  
Author(s):  
T. Ishii ◽  
H. Nozawa ◽  
T. Tamamura
Keyword(s):  
Nano Composite ◽  
New Approach ◽  
System A ◽  
Nanometer Pattern

Nanometer pattern fabrication using a novel X-ray mask with a cross-sectioned metal thin film absorber

1991 ◽  
Vol 13 (1-4) ◽  
pp. 315-318 ◽  
Author(s):  
T. Horiuchi ◽  
K. Deguchi ◽  
S. Hirota ◽  
A. Yoshikawa
Keyword(s):  
Thin Film ◽  
X Ray ◽  
Metal Thin Film ◽  
Nanometer Pattern
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