High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles

2011 ◽  
Vol 50 (5) ◽  
pp. 053603 ◽  
Author(s):  
Takeshi Nakazawa
2009 ◽  
Vol 17 (20) ◽  
pp. 18014 ◽  
Author(s):  
Cristina Trillo ◽  
Ángel F. Doval ◽  
Fernando Mendoza-Santoyo ◽  
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Manuel de la Torre-Ibarra ◽  
...  

1985 ◽  
Vol 16 (3) ◽  
pp. 48-55 ◽  
Author(s):  
Noboru Niki ◽  
Toshio Mizutani ◽  
Yoshizo Takahashi ◽  
Tamon Inouye

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