Rule-based approach to e-beam and process-induced proximity effect correction for phase-shifting mask fabrication

1994 ◽  
Author(s):  
Christophe Pierrat ◽  
Joseph G. Garofalo ◽  
John DeMarco ◽  
Sheila Vaidya ◽  
Oberdan W. Otto
Keyword(s):  
Proximity Effect ◽  
Phase Shifting ◽  
Rule Based ◽  
Rule Based Approach ◽  
Proximity Effect Correction ◽  
Mask Fabrication

Proximity Effect Correction for X-Ray Mask Fabrication

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6983-6988 ◽  
Author(s):  
Youichi Kuriyama ◽  
Shigeru Moriya ◽  
Shingo Uchiyama ◽  
Nobuo Shimazu
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Proximity Effect Correction ◽  
Mask Fabrication

Proximity Effect Correction for 1:1 X-Ray Mask Fabrication

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6976-6982
Author(s):  
Sunao Aya ◽  
Kouichi Moriizumi ◽  
Takeshi Fujino ◽  
Kinya Kamiyama ◽  
Hiroyuki Minami ◽  
...  
Keyword(s):  
Proximity Effect ◽  
X Ray ◽  
Proximity Effect Correction ◽  
Mask Fabrication

A Brief Survey on Text Classification Using Various Machine Learning Techniques

2018 ◽  
Vol 8 (1) ◽  
pp. 14
Author(s):  
Padmavathi .S ◽  
M. Chidambaram
Keyword(s):  
Machine Learning ◽  
Text Classification ◽  
Fixed Number ◽  
Machine Learning Techniques ◽  
Online Information ◽  
Rule Based ◽  
Learning Techniques ◽  
Machine Learning Approach ◽  
Rule Based Approach

Text classification has grown into more significant in managing and organizing the text data due to tremendous growth of online information. It does classification of documents in to fixed number of predefined categories. Rule based approach and Machine learning approach are the two ways of text classification. In rule based approach, classification of documents is done based on manually defined rules. In Machine learning based approach, classification rules or classifier are defined automatically using example documents. It has higher recall and quick process. This paper shows an investigation on text classification utilizing different machine learning techniques.

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

MRI Brain Tumor Image Analysis Using Fuzzy Rule based Approach

2019 ◽  
Vol 50 (2) ◽  
pp. 98-112 ◽  
Author(s):  
KALYAN KUMAR JENA ◽  
SASMITA MISHRA ◽  
SAROJANANDA MISHRA ◽  
SOURAV KUMAR BHOI ◽  
SOUMYA RANJAN NAYAK
Keyword(s):  
Image Analysis ◽  
Brain Tumor ◽  
Fuzzy Rule ◽  
Rule Based ◽  
Mri Brain ◽  
Rule Based Approach

Rule-based Approach to Semantic Resolution of Chinese Addresses

2010 ◽  
Vol 12 (1) ◽  
pp. 9-16 ◽  
Author(s):  
Xueying ZHNAG ◽  
Guonian LV ◽  
Boqiu LI ◽  
Wenjun CHEN
Keyword(s):  
Rule Based ◽  
Semantic Resolution ◽  
Rule Based Approach
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