Proximity Effect Correction for 1:1 X-Ray Mask Fabrication

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6976-6982
Author(s):  
Sunao Aya ◽  
Kouichi Moriizumi ◽  
Takeshi Fujino ◽  
Kinya Kamiyama ◽  
Hiroyuki Minami ◽  
...  
1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 6983-6988 ◽  
Author(s):  
Youichi Kuriyama ◽  
Shigeru Moriya ◽  
Shingo Uchiyama ◽  
Nobuo Shimazu

1996 ◽  
Vol 35 (Part 1, No. 3) ◽  
pp. 1929-1936 ◽  
Author(s):  
Sunao Aya ◽  
Koji Kise ◽  
Hideki Yabe ◽  
Kenji Marumoto

2020 ◽  
Vol 29 (4) ◽  
pp. 047501 ◽  
Author(s):  
Jingyuan Zhu ◽  
Sichao Zhang ◽  
Shanshan Xie ◽  
Chen Xu ◽  
Lijuan Zhang ◽  
...  

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama

1991 ◽  
Vol 13 (1-4) ◽  
pp. 165-172 ◽  
Author(s):  
M.G. Rosenfield ◽  
S.A. Rishton ◽  
D.P. Kern ◽  
D.E. Seeger ◽  
C.A. Whiting

2000 ◽  
Author(s):  
Masao Sugiyama ◽  
Shinji Kubo ◽  
Koji Hiruta ◽  
Takayuki Iwamatsu ◽  
Tatsuya Fujisawa ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document