SEM-contour shape analysis method for advanced semiconductor devices

2013 ◽  
Author(s):  
Yasutaka Toyoda ◽  
Hiroyuki Shindo ◽  
Yoshihiro Ota ◽  
Ryoichi Matsuoka ◽  
Yutaka Hojo ◽  
...  
Keyword(s):  
Shape Analysis ◽  
Semiconductor Devices ◽  
Analysis Method ◽  
Contour Shape

Novel pulse-shape-analysis method by using similarity

1998 ◽  
Vol 49 (9-11) ◽  
pp. 1219-1223 ◽  
Author(s):  
Y. Takenaka ◽  
A. Uritani ◽  
K. Inoue ◽  
H. Sakai ◽  
C. Mori
Keyword(s):  
Shape Analysis ◽  
Pulse Shape ◽  
Analysis Method ◽  
Pulse Shape Analysis

scholarly journals Amygdalar shape analysis method using surface contour aligning, spherical mapping, and probabilistic subregional segmentation

2011 ◽  
Vol 488 (1) ◽  
pp. 65-69 ◽  
Author(s):  
Namkug Kim ◽  
Hengjun J. Kim ◽  
Jaeuk Hwang ◽  
Sujung J. Yoon ◽  
Han Byul Cho ◽  
...  
Keyword(s):  
Shape Analysis ◽  
Analysis Method ◽  
Surface Contour

SEM-contour shape analysis based on circuit structure for advanced systematic defect inspection

2014 ◽  
Author(s):  
Yasutaka Toyoda ◽  
Hiroyuki Shindo ◽  
Yutaka Hojo ◽  
Daisuke Fuchimoto
Keyword(s):  
Shape Analysis ◽  
Defect Inspection ◽  
Contour Shape ◽  
Circuit Structure
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