High-repetition-rate KrF lithography excimer laser with narrow bandwidth below 2 pm

1990 ◽  
Author(s):  
Peter Lokai ◽  
Ulrich Rebhan ◽  
Peter Oesterlin ◽  
Hans-Juergen Kahlert ◽  
Dirk Basting
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Narrow Bandwidth

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser

High-repetition-rate XeC1 Excimer Laser

1994 ◽  
pp. 199-202
Author(s):  
Saburoh Satoh ◽  
Noboru Okamoto ◽  
Kohji Kakizaki ◽  
Shigeyuki Takagi ◽  
Ken Ishikawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition

32 W 100 MHz high repetition rate lasers with narrow bandwidth and tunable wavelength

2013 ◽  
Vol 25 (11) ◽  
pp. 2807-2810
Author(s):  
秦薪镇 Qin Xinzhen ◽  
叶志斌 Ye Zhibin ◽  
项震 Xiang Zhen ◽  
刘崇 Liu Chong ◽  
陈军 Chen Jun ◽  
...  
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Narrow Bandwidth ◽  
Tunable Wavelength

High-repetition-rate ArF excimer laser for microlithography

2000 ◽  
Author(s):  
Osamu Wakabayashi ◽  
Tatsuo Enami ◽  
Ken Ishii ◽  
Katsutomo Terashima ◽  
Yasuo Itakura ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser
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